Semiconductor device and method for manufacturing semiconductor device

ABSTRACT

An object is to reduce the manufacturing cost of a semiconductor device. An object is to improve the aperture ratio of a semiconductor device. An object is to make a display portion of a semiconductor device display a higher-definition image. An object is to provide a semiconductor device which can be operated at high speed. The semiconductor device includes a driver circuit portion and a display portion over one substrate. The driver circuit portion includes: a driver circuit TFT in which source and drain electrodes are formed using a metal and a channel layer is formed using an oxide semiconductor; and a driver circuit wiring formed using a metal. The display portion includes: a pixel TFT in which source and drain electrodes are formed using an oxide conductor and a semiconductor layer is formed using an oxide semiconductor; and a display wiring formed using an oxide conductor.

TECHNICAL FIELD

The present invention relates to semiconductor devices including oxidesemiconductors and manufacturing methods thereof.

Note that in this specification, a semiconductor device refers to alldevices that can function by utilizing semiconductor properties, andelectro-optic devices such as display devices, semiconductor circuits,and electronic devices are all semiconductor devices.

BACKGROUND ART

Light-transmitting metal oxides are used in semiconductor devices. Forexample, conductive metal oxides (hereinafter referred to as oxideconductors) such as indium tin oxide (ITO) are used as transparentelectrode materials needed in display devices such as liquid crystaldisplays.

In addition, light-transmitting metal oxides attract attention asmaterials having semiconductor properties. For example, In—Ga—Zn—O-basedoxides and the like are expected to be used as semiconductor materialsneeded in display devices such as liquid crystal displays. Inparticular, they are expected to be used for channel layers of thin filmtransistors (hereinafter also referred to as TFTs).

TFTs which include metal oxides having semiconductor properties(hereinafter referred to as oxide semiconductors) can be formed bylow-temperature processes. Thus, expectations for oxide semiconductorsas materials which replace or surpass amorphous silicon used in displaydevices and the like are increased.

Further, oxide conductors and oxide semiconductors havelight-transmitting properties. Thus, by forming TFTs with the use ofthese materials, light-transmitting TFTs can be formed (for example, seeNon-Patent Document 1).

Furthermore, TFTs including oxide semiconductors have high field effectmobility. Thus, driver circuits in display devices or the like can beformed using the TFTs (for example, see Non-Patent Document 2).

REFERENCE Non-Patent Document

-   [Non-Patent Document 1] T. Nozawa, “Transparent Circuitry”, Nikkei    Electronics, No. 959, Aug. 27, 2007, pp. 39-52.-   [Non-Patent Document 2] T. Osada et al., “Development of    Driver-Integrated Panel using Amorphous In—Ga—Zn-Oxide TFT”, Proc.    SID '09 Digest, 2009, pp. 184-187.

DISCLOSURE OF INVENTION

It is an object of one embodiment of the present invention to reduce themanufacturing cost of a semiconductor device.

It is an object of one embodiment of the present invention to improvethe aperture ratio of a semiconductor device.

It is an object of one embodiment of the present invention to make adisplay portion of a semiconductor device display a higher-definitionimage.

It is an object of one embodiment of the present invention to provide asemiconductor device which can be operated at high speed.

One embodiment of the present invention is a display device including adriver circuit portion and a display portion over one substrate. Thedriver circuit portion includes a driver circuit TFT and a drivercircuit wiring. A source electrode (also referred to as a sourceelectrode layer) and a drain electrode (a drain electrode layer) of thedriver circuit TFT are formed using a metal. A channel layer of thedriver circuit TFT is formed using an oxide semiconductor. The drivercircuit wiring is formed using a metal. The display portion includes apixel TFT and a display portion wiring. A source electrode and a drainelectrode of the pixel TFT are formed using an oxide conductor. Asemiconductor layer of the pixel TFT is formed using an oxidesemiconductor. The display portion wiring is formed using an oxideconductor.

Note that a specific manufacturing process of a TFT and a specificstructure of a different element (e.g., a capacitor) included in adisplay device are not disclosed in Non-Patent Document 1. In addition,it is not disclosed that a driver circuit and a light-transmitting TFTare formed over one substrate.

In a semiconductor device of one embodiment of the present invention, adriver circuit portion including a driver circuit TFT and a displayportion including a pixel TFT are formed over one substrate. Thus, themanufacturing cost of the semiconductor device can be reduced.

In a semiconductor device of one embodiment of the present invention, adisplay portion includes a pixel TFT and a display portion wiring. Asource electrode and a drain electrode of the pixel TFT are formed usingan oxide conductor. A semiconductor layer of the pixel TFT is formedusing an oxide semiconductor. The display portion wiring is formed usingan oxide conductor. That is, in the semiconductor device, a region wherethe pixel TFT and the display portion wiring are formed can be used asan opening. Thus, the aperture ratio of the semiconductor device can beimproved.

In a semiconductor device of one embodiment of the present invention, adisplay portion includes a pixel TFT and a display portion wiring. Asource electrode and a drain electrode of the pixel TFT are formed usingan oxide conductor. A semiconductor layer of the pixel TFT is formedusing an oxide semiconductor. The display portion wiring is formed usingan oxide conductor. That is, in the semiconductor device, it is possibleto design the pixel size without limitation on the size of the pixelTFT. Thus, it is possible to make the display portion of thesemiconductor device display a higher-definition image.

In a semiconductor device of one embodiment of the present invention, adriver circuit portion includes a driver circuit TFT and a drivercircuit wiring. A source electrode and a drain electrode of the drivercircuit TFT are formed using a metal. A channel layer of the drivercircuit TFT is formed using an oxide semiconductor. The driver circuitwiring is formed using a metal. That is, in the semiconductor device, adriver circuit includes a TFT having high field effect mobility and awiring having low resistance. Thus, the semiconductor device can beoperated at high speed.

As an oxide semiconductor used in this specification, a thin film of amaterial expressed by InMO₃(ZnO)_(m) (m>0) is formed, and a thin filmtransistor including the thin film as an oxide semiconductor layer isformed. Note that M denotes one or more metal elements selected from Ga,Fe, Ni, Mn, and Co. For example, M might be Ga or might be Ga and theabove metal element other than Ga, for example, Ga and Ni or Ga and Fe.Further, in the oxide semiconductor, in some cases, a transitional metalelement such as Fe or Ni or an oxide of the transitional metal iscontained as an impurity element in addition to the metal elementcontained as M. In this specification, among oxide semiconductor layerswhose material is expressed by InMO₃(ZnO)_(m) (m>0), an oxidesemiconductor which includes Ga as M is referred to as anIn—Ga—Zn—O-based oxide semiconductor, and a thin film of theIn—Ga—Zn—O-based oxide semiconductor is also referred to as anIn—Ga—Zn—O-based non-single-crystal film.

As an oxide semiconductor used for the oxide semiconductor layer, any ofthe following oxide semiconductors can be used in addition to the aboveoxide semiconductors: an In—Sn—Zn—O-based oxide semiconductor; anIn—Al—Zn—O-based oxide semiconductor; a Sn—Ga—Zn—O-based oxidesemiconductor; an Al—Ga—Zn—O-based oxide semiconductor; aSn—Al—Zn—O-based oxide semiconductor; an In—Zn—O-based oxidesemiconductor; a Sn—Zn—O-based oxide semiconductor; an Al—Zn—O-basedoxide semiconductor; an In—O-based oxide semiconductor; a Sn—O-basedoxide semiconductor; and a Zn—O-based oxide semiconductor. Silicon oxidemay be contained in the above oxide semiconductor layer. By inclusion ofsilicon oxide (SiO, (x>0)), which hinders crystallization, in the oxidesemiconductor layer, crystallization of the oxide semiconductor layerduring heat treatment after formation of the oxide semiconductor layerin the manufacturing process can be suppressed. Note that the oxidesemiconductor layer is preferably amorphous but may be partlycrystallized.

The oxide semiconductor preferably contains In. More preferably, itcontains In and Ga. In obtaining an i-type (intrinsic) oxidesemiconductor, dehydration or dehydrogenation are effective.

In the case where heat treatment is performed in an atmosphere of aninert gas such as nitrogen or a rare gas (e.g., argon or helium) orunder reduced pressure, an oxide semiconductor layer is changed into anoxygen-deficient oxide semiconductor layer by the heat treatment so asto be a low-resistant oxide semiconductor layer, i.e., an n-type(n⁻-type) oxide semiconductor layer. Then, the oxide semiconductor layeris made to be in an oxygen-excess state by formation of an oxideinsulating film which is in contact with the oxide semiconductor layerso as to be a high-resistant oxide semiconductor layer, i.e., an i-typeoxide semiconductor layer. Thus, it is possible to form and provide asemiconductor device including a highly reliable thin film transistorhaving favorable electrical characteristics.

In dehydration or dehydrogenation, heat treatment is performed at atemperature which is higher than or equal to 350° C., preferably higherthan or equal to 400° C., and lower than the strain point of a substratein the atmosphere of an inert gas such as nitrogen or a rare gas (e.g.,argon or helium) or under reduced pressure, so that an impurity such asmoisture contained in the oxide semiconductor layer is reduced.

The condition of heat treatment performed on the oxide semiconductorlayer subjected to dehydration or dehydrogenation is set such that twopeaks of water or at least one peak of water at around 300° C. is notdetected even when thermal desorption spectroscopy (TDS) at up to 450°C. is performed on the oxide semiconductor layer after being subjectedto dehydration or dehydrogenation. Thus, even when TDS at up to 450° C.is performed on a thin film transistor including an oxide semiconductorlayer subjected to dehydration or dehydrogenation, at least the peak ofwater at around 300° C. is not detected.

In addition, it is important not to remix water or hydrogen into theoxide semiconductor layer by cooling the oxide semiconductor layer inthe same furnace used for dehydration or dehydrogenation from a heatingtemperature T at which dehydration or dehydrogenation are performedwithout exposure to the air. When a thin film transistor is formed usingan oxide semiconductor layer obtained by changing an oxide semiconductorlayer into a low-resistant oxide semiconductor layer, i.e., an n-type(e.g., n⁻-type or n⁺-type) oxide semiconductor layer by dehydration ordehydrogenation and then by changing the oxide semiconductor layer intoa high-resistant oxide semiconductor layer so as to be an i-typesemiconductor layer, the threshold voltage of the thin film transistorcan be positive voltage, so that a so-called normally-off switchingelement can be realized. It is preferable that a channel of asemiconductor device (display device) be formed under such a conditionthat the gate voltage of the thin film transistor is a threshold voltagethat is positive and as close to 0 V as possible. Note that when thethreshold voltage of the thin film transistor is negative, the thin filmtransistor tends to be so-called normally on; that is, current flowsbetween a source electrode and a drain electrode even when gate voltageis 0 V. In an active matrix display device, the electricalcharacteristics of a thin film transistor included in a circuit areimportant and influence the performance of the display device. Among theelectrical characteristics of the thin film transistor, the thresholdvoltage (Vth) is particularly important. When the threshold voltage ishigh or negative even when field effect mobility is high, it isdifficult to control the circuit. In the case where a thin filmtransistor has a high threshold voltage and a large absolute value ofits threshold voltage, the thin film transistor cannot perform aswitching function as the TFT and might be a load when the TFT is drivenat a low voltage. In the case of an n-channel thin film transistor, itis preferable that a channel be formed and drain current flows after apositive voltage is applied as gate voltage. A transistor in which achannel is not formed unless the driving voltage is increased and atransistor in which a channel is formed and drain current flows evenwhen a negative voltage is applied are unsuitable for a thin filmtransistor used in a circuit.

In addition, the gas atmosphere in which temperature is lowered from theheating temperature T may be changed into a gas atmosphere which isdifferent from the gas atmosphere in which temperature is raised to theheating temperature T. For example, cooling is performed by using thefurnace in which dehydration or dehydrogenation are performed and byfilling the furnace with a high-purity oxygen gas, a high-purity N₂Ogas, or ultra-dry air (having a dew point of −40° C. or lower,preferably −60° C. or lower) without exposure to the air.

The electrical characteristics of a thin film transistor are improvedusing an oxide semiconductor film cooled slowly (or cooled) in anatmosphere which does not contain moisture (having a dew point of −40°C. or lower, preferably −60° C. or lower) after moisture contained in afilm is reduced by heat treatment in which dehydration ordehydrogenation are performed, and high-performance thin filmtransistors which can be mass-produced are realized.

In this specification, heat treatment in the atmosphere of an inert gassuch as nitrogen or a rare gas (e.g., argon or helium) or under reducedpressure is referred to as heat treatment for dehydration ordehydrogenation. In this specification, for convenience, dehydration ordehydrogenation refer not only to elimination as H₂ but also toelimination of H, OH, or the like.

In the case where heat treatment is performed in the atmosphere of aninert gas such as nitrogen or a rare gas (e.g., argon or helium) orunder reduced pressure, an oxide semiconductor layer is changed into anoxygen-deficient oxide semiconductor layer by the heat treatment so asto be a low-resistant oxide semiconductor layer, i.e., an n-type(n⁻-type) oxide semiconductor layer. After that, a region overlappingwith a drain electrode layer as a high-resistant drain region (alsoreferred to as an HRD region) which is an oxygen-deficient region isformed.

Specifically, the carrier concentration of the high-resistant drainregion is higher than or equal to 1×10¹⁷/cm³ and is at least higher thanthe carrier concentration of a channel formation region (lower than1×10¹⁷/cm³). Note that the carrier concentration in this specificationis carrier concentration obtained by Hall effect measurement at roomtemperature.

A low-resistant drain region (also referred to as an LRN region) may beformed between the oxide semiconductor layer and the drain electrodelayer formed using a metal material. Specifically, the carrierconcentration of the low-resistant drain region is higher than that ofthe high-resistant drain region (the HRD region); for example, it ishigher than or equal to 1×10²⁰/cm³ and lower than or equal to1×10²¹/cm³.

Then, a channel formation region is formed by making at least a part ofthe oxide semiconductor layer subjected to dehydration ordehydrogenation in an oxygen-excess state so as to be a high-resistantoxide semiconductor layer, i.e., an i-type oxide semiconductor layer.Note that as the treatment for making the oxide semiconductor layersubjected to dehydration or dehydrogenation in an oxygen-excess state,deposition of an oxide insulating film which is in contact with theoxide semiconductor layer subjected to dehydration or dehydrogenation bysputtering, heat treatment after the deposition of the oxide insulatingfilm, heat treatment after the deposition of the oxide insulating filmin an atmosphere containing oxygen, cooling treatment in an oxygenatmosphere after heat treatment in an inert gas atmosphere after thedeposition of the oxide insulating film, cooling treatment in ultra-dryair (having a dew point of −40° C. or lower, preferably −60° C. orlower) after heat treatment in an inert gas atmosphere after thedeposition of the oxide insulating film, or the like is performed.

Further, in order to use at least a part of the oxide semiconductorlayer subjected to dehydration or dehydrogenation (a portion overlappingwith a gate electrode layer) as the channel formation region, the oxidesemiconductor layer is selectively made in an oxygen-excess state so asto be a high-resistant oxide semiconductor layer, i.e., an i-type oxidesemiconductor layer. The channel formation region can be formed in sucha manner that a source electrode layer and a drain electrode layerincluding metal electrodes of Ti or the like are formed on and incontact with the oxide semiconductor layer subjected to dehydration ordehydrogenation and exposure regions which do not overlap with thesource electrode layer and the drain electrode layer are selectivelymade in an oxygen-excess state. In the case where the exposure regionsare selectively made in an oxygen-excess state, a first high-resistantdrain region overlapping with the source electrode layer and a secondhigh-resistant drain region overlapping with the drain electrode layerare formed, and the channel formation region is formed between the firsthigh-resistant drain region and the second high-resistant drain region.That is, the channel formation region is formed between the sourceelectrode layer and the drain electrode layer in a self-aligning manner.

Thus, it is possible to form and provide a semiconductor deviceincluding a highly reliable thin film transistor having favorableelectrical characteristics.

Note that by forming the high-resistant drain region in the oxidesemiconductor layer overlapping with the drain electrode layer (and thesource electrode layer), the reliability when a driver circuit is formedcan be improved. Specifically, by forming the high-resistant drainregion, it is possible to employ a structure in which conductivity canbe gradually varied from the drain electrode layer to the high-resistantdrain region and the channel formation region. In the case whereoperation is performed with the drain electrode layer connected to awiring for supplying a high power supply potential VDD, even when a highelectric field is applied between the gate electrode layer and the drainelectrode layer, the high electric field is not applied locally becausethe high-resistant drain region serves as a buffer; therefore, thewithstand voltage of the transistor can be improved.

A low-resistant drain region (also referred to as an LRN region) may beformed between the drain electrode layer (and the source electrodelayer) formed using a metal material and the oxide semiconductor layer.The low-resistant drain region (also referred to as the LRN region) canfurther improve the withstand voltage of the transistor.

In addition, by forming the high-resistant drain region in the oxidesemiconductor layer overlapping with the drain electrode layer (and thesource electrode layer), the amount of leakage current in the channelformation region when the driver circuit is formed can be reduced.Specifically, by forming the high-resistant drain region, the leakagecurrent of the transistor, which flows between the drain electrode layerand the source electrode layer, flows sequentially from the drainelectrode layer, the high-resistant drain region on the drain electrodelayer side, the channel formation region, the high-resistant drainregion on the source electrode layer side, and the source electrodelayer. In this case, in the channel formation region, leakage currentflowing from an low-resistant n-type region on the drain electrode layerside to the channel formation region can be concentrated on the vicinityof an interface between the channel formation region and a gateinsulating layer which has high resistance when the transistor is off.Thus, the amount of leakage current in a back channel portion (a part ofa surface of the channel formation region, which is apart from the gateelectrode layer) can be reduced.

Further, the first high-resistant drain region overlapping with thesource electrode layer and the second high-resistant drain regionoverlapping with the drain electrode layer overlap with a part of thegate electrode layer with the gate insulating layer interposedtherebetween depending on the width of the gate electrode layer, and theintensity of an electric field near an end portion of the drainelectrode layer can be reduced more effectively.

That is, a semiconductor device which is one embodiment of the presentinvention includes: a driver circuit including a first thin filmtransistor, and a pixel portion including a second thin film transistorover one substrate. The second thin film transistor includes: abottom-gate electrode over the substrate, a gate insulating layer overthe bottom-gate electrode, an oxide semiconductor layer over the gateinsulating layer, a second channel protective layer in contact with apart of the oxide semiconductor layer, a source electrode and a drainelectrode over the second channel protective layer and the oxidesemiconductor layer, and a pixel electrode layer over the second channelprotective layer. The bottom-gate electrode, the gate insulating layer,the oxide semiconductor layer, the source electrode, the drainelectrode, the second channel protective layer, and the pixel electrodelayer of the second thin film transistor have a light-transmittingproperty. A material for a source electrode and a drain electrode of thefirst thin film transistor is different from that for the sourceelectrode and the drain electrode of the second thin film transistor,and it is a conductive material which has a lower resistance than thesource electrode and the drain electrode of the second thin filmtransistor.

Another embodiment of the present invention is a semiconductor deviceaccording to the above semiconductor device, in which the first thinfilm transistor includes: a first channel protective layer in contactwith a part of an oxide semiconductor layer of the first thin filmtransistor, and a source and a drain electrode over the first channelprotective layer and the oxide semiconductor layer.

Another embodiment of the present invention is a semiconductor deviceaccording to the above semiconductor device, in which the first thinfilm transistor includes: a first channel protective layer in contactwith a part of an oxide semiconductor layer of the first thin filmtransistor, a source electrode and a drain electrode over the firstchannel protective layer and the oxide semiconductor layer, and aback-gate electrode over a channel formation region with the firstchannel protective layer interposed therebetween.

Another embodiment of the present invention is a semiconductor deviceaccording to the above semiconductor device, in which the first channelprotective layer and the second channel protective layer are formedusing the same light-transmitting insulating material.

Another embodiment of the present invention is a semiconductor deviceaccording to the above semiconductor device, in which the sourceelectrode and the drain electrode of the first thin film transistor areeach formed using an element selected from Al, Cr, Cu, Ta, Ti, Mo, andW, or a stacked film formed in combination with an alloy film thereof.

Another embodiment of the present invention is a semiconductor deviceaccording to the above semiconductor device, in which the sourceelectrode, the drain electrode, and the pixel electrode layer of thesecond thin film transistor are formed using indium oxide, an alloy ofindium oxide and tin oxide, an alloy of indium oxide and zinc oxide, orzinc oxide.

Another embodiment of the present invention is a semiconductor deviceaccording to the above semiconductor device, which includes a capacitorportion over the same substrate. The capacitor portion includes acapacitor wiring and a capacitor electrode overlapping with thecapacitor wiring. The capacitor wiring and the capacitor electrode havea light-transmitting property.

A thin film transistor having stable electrical characteristics can beprovided. Therefore, a semiconductor device which includes highlyreliable thin film transistors having favorable electricalcharacteristics can be provided.

BRIEF DESCRIPTION OF DRAWINGS

In the accompanying drawings:

FIGS. 1A, 1B, 1C1, and 1C2 illustrate thin film transistors;

FIGS. 2A to 2C illustrate a method for manufacturing the thin filmtransistors;

FIGS. 3A to 3C illustrate the method for manufacturing the thin filmtransistors;

FIGS. 4A, 4B, 4C1, and 4C2 illustrate thin film transistors;

FIGS. 5A to 5C illustrate a method for manufacturing the thin filmtransistors;

FIGS. 6A to 6C illustrate the method for manufacturing the thin filmtransistors;

FIG. 7 illustrates thin film transistors;

FIG. 8 illustrates thin film transistors;

FIGS. 9A and 9B illustrate a semiconductor device;

FIGS. 10A and 10B illustrate a semiconductor device;

FIGS. 11A and 11B illustrate a semiconductor device;

FIGS. 12A1, 12A2, and 12B illustrate a display device;

FIGS. 13A and 13B illustrate a display device;

FIG. 14 illustrates an equivalent circuit of a pixel of a semiconductordevice;

FIGS. 15A to 15C illustrate display devices;

FIGS. 16A and 16B are block diagrams each illustrating a semiconductordevice;

FIGS. 17A and 17B illustrate a display device;

FIGS. 18A to 18C illustrate a display device;

FIGS. 19A and 19B illustrate a display device;

FIG. 20 illustrates a display device;

FIG. 21 illustrates a display device;

FIG. 22 is an external view illustrating an example of an electronicbook reader;

FIGS. 23A and 23B are external views illustrating examples of atelevision device and a digital photo frame;

FIGS. 24A and 24B are external views illustrating examples of gamemachines;

FIGS. 25A and 25B are external views respectively illustrating anexample of a portable computer and an example of a mobile phone;

FIG. 26 illustrates a semiconductor device;

FIG. 27 illustrates the semiconductor device;

FIG. 28 illustrates the semiconductor device;

FIG. 29 illustrates the semiconductor device;

FIG. 30 illustrates a semiconductor device;

FIG. 31 illustrates the semiconductor device;

FIG. 32 illustrates the semiconductor device;

FIG. 33 illustrates the semiconductor device;

FIG. 34 illustrates a semiconductor device;

FIG. 35 illustrates the semiconductor device;

FIG. 36 illustrates a semiconductor device;

FIG. 37 illustrates the semiconductor device;

FIG. 38 illustrates a semiconductor device;

FIG. 39 illustrates the semiconductor device; and

FIG. 40 illustrates a semiconductor device.

BEST MODE FOR CARRYING OUT THE INVENTION

Embodiments are described in detail with reference to the accompanyingdrawings. Note that the present invention is not limited to thefollowing description and it will be readily appreciated by thoseskilled in the art that modes and details can be modified in variousways without departing from the spirit and the scope of the presentinvention. Therefore, the invention should not be construed as beinglimited to the description in the following embodiments. Note that instructures of the present invention described hereinafter, the sameportions or portions having similar functions are denoted by the samereference numerals in different drawings, and description thereof is notrepeated.

Embodiment 1

In this embodiment, described are a thin film transistor which is oneembodiment of the present invention and its manufacturing method.

FIG. 1A illustrates a cross-sectional view of a thin film transistor 141and a thin film transistor 142, each of which is one embodiment of thepresent invention. The thin film transistors 141 and 142 are formed overa substrate 100, and both of them are bottom-gate type thin filmtransistors. The thin film transistor 141 is provided for a drivercircuit, and the thin film transistor 142 is provided for a pixel.

FIG. 1C1 is a plane view of the channel-stop-type thin film transistor141 provided for a driver circuit, and a cross-sectional view takenalong line C1-C2 in FIG. 1C1 is illustrated in FIG. 1A. Across-sectional view taken along line C3-C4 in FIG. 1C1 is illustratedin FIG. 1B.

FIG. 1C2 is a plane view of the channel-stop-type thin film transistor142 provided for a pixel, and a cross-sectional view taken along lineD1-D2 in FIG. 1C2 is illustrated in FIG. 1A. A cross-sectional viewtaken along line D3-D4 in FIG. 1C2 is illustrated in FIG. 1B.

The thin film transistor 141 includes a first bottom-gate electrode 111,a gate insulating film 102, an oxide semiconductor layer 113 including athird oxide semiconductor layer 113 c and fourth oxide semiconductorregions 113 d, a first channel protective layer 116, and source anddrain electrodes each formed over the substrate 100. Note that thesource and drain electrodes are formed using a conductive layer in whicha second conductive layer 115 a is stacked over a first conductive layer114 a which transmits visible light, and a conductive layer in which asecond conductive layer 115 b is stacked over a first conductive layer114 b which transmits visible light. Further, a first protectiveinsulating film 107 is formed to cover these and to be in contact withthe first channel protective layer 116. A second protective insulatingfilm 108 is formed over the first protective insulating film 107.Furthermore, a back-gate electrode 129 is formed over the secondprotective insulating film 108 and it overlaps with the third oxidesemiconductor layer 113 c.

Note that the low-resistant fourth oxide semiconductor regions 113 d incontact with undersurfaces of the source and drain electrodes are formedin a self-aligned manner with respect to the channel protective layer.In addition, the thin film transistor 141 described in this embodimentis one embodiment of a channel-stop type.

When a pixel portion and a driver circuit are formed over one substratein a liquid crystal display device, in the driver circuit, only eitherpositive polarity or negative polarity is applied between the source anddrain electrodes in a thin film transistor for constituting a logic gatesuch as an inverter circuit, a NAND circuit, a NOR circuit, or a latchcircuit or a thin film transistor for constituting an analog circuitsuch as a sense amplifier, a constant voltage generating circuit, or aVCO. Therefore, one of the fourth oxide semiconductor regions 113 dwhich requires a withstand voltage may be designed to be wider than theother fourth oxide semiconductor region 113 d. In addition, the width ofthe fourth oxide semiconductor region 113 d overlapping with thebottom-gate electrode may be increased.

A thin film transistor having a single-gate structure is described asthe thin film transistor 141 provided for a driver circuit; however, athin film transistor having a multi-gate structure in which a pluralityof channel formation regions are included can also be used as needed.

The back-gate electrode 129 is formed over and to overlap with the oxidesemiconductor layer 113. The oxide semiconductor layer 113 is interposedbetween the bottom-gate electrode 111 and the back-gate electrode 129.By electrically connecting the back-gate electrode 129 and thebottom-gate electrode 111 to have the same potential, a gate voltage canbe applied to the oxide semiconductor layer 113 from above and below.When the potential of the bottom-gate electrode 111 and that of theback-gate electrode 129 are different, for example, one of them has afixed potential, GND, or 0 V, electrical characteristics of the TFT suchas the threshold voltage can be controlled. Note that in thisspecification, the conductive layer formed over and to overlap with theoxide semiconductor layer 113 is referred to as the back-gate electrode129 regardless of its potential. Therefore, the back-gate electrode 129can also be in a floating state.

The first protective insulating film 107 and the second protectiveinsulating film 108 are stacked between the back-gate electrode 129 andthe oxide semiconductor layer 113.

The thin film transistor 142 includes a second bottom-gate electrode211, the gate insulating film 102, an oxide semiconductor layer 213formed of a third oxide semiconductor layer 213 c and fourth oxidesemiconductor regions 213 d, a second channel protective layer 216, andsource and drain electrodes (denoted by 214 a and 214 b) each formedover the substrate 100. Further, the first protective insulating film107 is formed to cover these and to be in contact with the secondchannel protective layer 216. The second protective insulating film 108is formed over the first protective insulating film 107.

Note that the low-resistant fourth oxide semiconductor regions 213 d incontact with undersurfaces of the source and drain electrodes are formedin a self-aligned manner. In addition, the thin film transistor 142described in this embodiment is one embodiment of a channel-stop type.Note also that a pixel electrode 128 is formed over the secondprotective insulating film 108 to overlap with the thin film transistor142.

An AC drive is performed in the liquid crystal display device in orderto prevent deterioration of a liquid crystal. Through the AC drive, thepolarity of a signal potential applied to a pixel electrode layer isinverted to be negative or positive at regular intervals of time. In aTFT connected to the pixel electrode layer, a pair of electrodesfunctions alternately as a source electrode and a drain electrode. Inthis specification, one electrode of the pixel thin film transistor isreferred to as a source electrode and the other is referred to as adrain electrode; actually in AC drive, one electrode functionsalternately as the source electrode and the drain electrode. In order toreduce leakage current, the second bottom-gate electrode of the thinfilm transistor 142 provided for a pixel may be narrower than the firstbottom-gate electrode of the thin film transistor 141 provided for adriver circuit. In order to reduce the leakage current, the bottom-gateelectrode of the thin film transistor 142 provided for a pixel may bedesigned so as not to overlap with the source or drain electrode.

A thin film transistor having a single-gate structure is described asthe thin film transistor 142 provided for a pixel; however, a thin filmtransistor having a multi-gate structure in which a plurality of channelformation regions are included can also be used as needed.

In the thin film transistor 142, used are: the third oxide semiconductorlayer 213 c which transmits visible light; the second bottom-gateelectrode 211 and the source and drain electrodes (denoted by 214 a and214 b) formed using a conductive film which transmits visible light; thesubstrate 100 which transmits visible light; and the second channelprotective layer 216, the first protective insulating film 107, and thesecond protective insulating film 108 which transmit visible light.Therefore, the thin film transistor 142 is a so-called transparenttransistor which transmits visible light.

FIGS. 2A to 2C and FIGS. 3A to 3C illustrate cross-sectional views inmanufacture of the thin film transistors 141 and 142.

The substrate 100 transmits visible light and has an insulating surface.Specifically, it is possible to use any glass substrate used in theelectronics industry (also called an alkali-free glass substrate) suchas an aluminosilicate glass substrate, an aluminoborosilicate glasssubstrate, or a barium borosilicate glass substrate, a plastic substratewith heat resistance which can withstand a process temperature in thismanufacturing process, or the like. When the substrate 100 having aninsulating surface is a mother glass, any of the following sizes of thesubstrate can be used: the first generation (320 mm×400 mm); the secondgeneration (400 mm×500 mm); the third generation (550 mm×650 mm); thefourth generation (680 mm×880 mm or 730 mm×920 mm); the fifth generation(1000 mm×1200 mm or 1100 mm×1250 mm); the sixth generation (1500 mm×1800mm); the seventh generation (1900 mm×2200 mm); the eighth generation(2160 mm×2460 mm); the ninth generation (2400 mm×2800 mm or 2450 mm×3050mm); the tenth generation (2950 mm×3400 mm); and the like.

A base insulating layer may be formed between the substrate 100 andelectrode the first bottom-gate electrode 111 and between the substrate100 and the second bottom-gate electrode 211. The base insulating layercan be formed using an insulating film preventing diffusion of animpurity element (e.g., sodium) from the substrate 100 into the thinfilm transistor. For example, it is possible to use one or more filmsselected from a silicon nitride film, a silicon oxide film, a siliconnitride oxide film, and a silicon oxynitride film.

The first bottom-gate electrode 111 and the second bottom-gate electrode211 are formed over the substrate 100 having an insulating surface. Thefirst bottom-gate electrode 111 and the second bottom-gate electrode 211are formed using a conductive film which transmits visible light.

The first bottom-gate electrode 111 and the second bottom-gate electrode211 are formed using a light-transmitting conductive material, forexample, indium oxide containing tungsten oxide, indium zinc oxidecontaining tungsten oxide, indium oxide containing titanium oxide,indium tin oxide containing titanium oxide, indium tin oxide(hereinafter referred to as ITO), indium zinc oxide, indium tin oxide towhich silicon oxide is added, an In—Sn—Zn—O-based oxide semiconductor,an In—Al—Zn—O-based oxide semiconductor, a Sn—Ga—Zn—O-based oxidesemiconductor, an Al—Ga—Zn—O-based oxide semiconductor, aSn—Al—Zn—O-based oxide semiconductor, a Sn—Zn—O-based oxidesemiconductor, an Al—Zn—O-based oxide semiconductor, an In—O-based oxidesemiconductor, a Sn—O-based oxide semiconductor, a Zn—O-based oxidesemiconductor, or the like. The thickness is set within the range of 50nm to 300 nm inclusive.

Alternatively, it is possible to use, for example, an oxynitride filmcontaining In (indium), Ga (gallium), and Zn (zinc) formed by sputteringusing an oxide semiconductor target containing In, Ga, and Zn(In₂O₃:Ga₂O₃:ZnO=1:1:1) in an atmosphere containing a nitrogen gas.Further alternatively, an Al—Zn—O-based non-single-crystal film, or anAl—Zn—O-based non-single-crystal film containing nitrogen, in otherwords, an Al—Zn—O—N-based non-single-crystal film (also referred to asan AZON film) may be used.

The light-transmitting conductive film is deposited by a sputteringmethod, a vacuum evaporation method (e.g., an electron beam evaporationmethod), an arc discharge ion plating method, or a spray method. When asputtering method is employed, it is preferable that deposition beperformed using a target containing SiO₂ of 2 to 10 percent by weightand SiOx (x>0) which inhibits crystallization be contained in thelight-transmitting conductive film so as to prevent crystallization atthe time of the heat treatment for dehydration or dehydrogenation in alater step.

A wiring layer including the first bottom-gate electrode 111, similarlyto the second bottom-gate electrode 211, may be formed using aconductive material which transmits visible light. Alternatively, it maybe formed using a metal material having heat resistance such asmolybdenum or tungsten, or an alloy material containing one of theseelements as a main component, as a single layer or a stacked layer.

The wiring layer including the first bottom-gate electrode 111 ispreferably formed using the same conductive film as the second bottomelectrode 211 because the number of steps can be reduced. The wiringlayer including the first bottom-gate electrode 111 is preferably formedusing a metal material having heat resistance or an alloy materialcontaining it as a main component because wiring resistance can bereduced.

For example, in the case where the wiring layer including the firstbottom-gate electrode 111 has a two-layer structure, the followingstructures are preferable: a two-layer structure of an aluminum layerand a molybdenum layer stacked thereover, a two-layer structure of acopper layer and a molybdenum layer stacked thereover, a two-layerstructure of a copper layer and a titanium nitride layer or a tantalumnitride layer stacked thereover, and a two-layer structure of a titaniumnitride layer and a molybdenum layer. In the case of a three-layerstructure, a stacked-layer structure of a tungsten layer or a tungstennitride layer, a layer of an alloy of aluminum and silicon or an alloyof aluminum and titanium, and a titanium nitride layer or a titaniumlayer is preferable.

In this embodiment, after a conductive film which transmits visiblelight is formed over an entire surface of the substrate 100, a firstphotolithography step is performed to form a resist mask over theconductive film, unnecessary portions are removed by etching, andwirings and electrodes (e.g., a gate wiring including the firstbottom-gate electrode 111 and the second bottom-gate electrode 211, acapacitor wiring, a terminal electrode, and the like) are formed.

Next, the gate insulating film 102 is formed over the first bottom-gateelectrode 111 and the second bottom-gate electrode 211. In thisembodiment, a single layer of silicon nitride is formed as the gateinsulating film 102.

The gate insulating film 102 can be formed using a single layer or astacked layer using any of a silicon oxide layer, a silicon nitridelayer, a silicon oxynitride layer, and a silicon nitride oxide layer.Here, a single layer of silicon nitride film is used.

The gate insulating film 102 can be formed by a plasma CVD method or asputtering method, for example. In the case of employing the plasma CVDmethod, a silicon oxynitride layer may be formed using SiH₄ and eitheror both oxygen or/and nitrogen as a source gas. Alternatively,dinitrogen monoxide or the like may be used instead of oxygen andnitrogen.

Next, an oxide semiconductor film is formed over the gate insulatingfilm 102.

It is possible to use the following as the oxide semiconductor film: anIn—Ga—Zn—O-based non-single-crystal film, an In—Sn—Zn—O-based oxidesemiconductor film, an In—Al—Zn—O-based oxide semiconductor film, aSn—Ga—Zn—O-based oxide semiconductor film, an Al—Ga—Zn—O-based oxidesemiconductor film a Sn—Al—Zn—O-based oxide semiconductor film, anIn—Zn—O-based oxide semiconductor film, a Sn—Zn—O-based oxidesemiconductor film, an Al—Zn—O-based oxide semiconductor film, anIn—O-based oxide semiconductor film, an Sn—O-based oxide semiconductorfilm, or a Zn—O-based oxide semiconductor film. In this embodiment, theoxide semiconductor film is formed by a sputtering method with use of anIn—Ga—Zn—O-based oxide semiconductor target. Alternatively, the oxidesemiconductor film can be formed by a sputtering method in a rare gas(typically argon) atmosphere, an oxygen atmosphere, or an atmospherecontaining a rare gas (typically argon) and oxygen. When a sputteringmethod is employed, it is preferable that deposition be performed usinga target containing SiO₂ of 2 to 10 percent by weight and SiOx (x>0)which inhibits crystallization be contained in the light-transmittingconductive film so as to prevent crystallization at the time of the heattreatment for dehydration or dehydrogenation in a later step.

Next, the oxide semiconductor film is processed into island-shaped firstoxide semiconductor layers 113 a and 213 a through a secondphotolithography step (see FIG. 2A). A resist mask for forming theisland-shaped oxide semiconductor layers may be formed by an ink-jetmethod. In the case where the resist mask is formed by an ink-jetmethod, manufacture cost can be reduced because a photomask isunnecessary.

Note that before the oxide semiconductor film is formed by a sputteringmethod, dust attached to a surface of the gate insulating film 102 ispreferably removed by reverse sputtering in which an argon gas isintroduced to generate plasma.

The reverse sputtering refers to a method in which, without applicationof a voltage to a target side, an RF power source is used forapplication of a voltage to a substrate side in an argon atmosphere tomodify a surface. Note that, nitrogen, helium, oxygen, or the like maybe used instead of an argon atmosphere.

Next, dehydration or dehydrogenation are performed on the first oxidesemiconductor layers 113 a and 213 a. The temperature in first heattreatment for dehydration or dehydrogenation is higher than or equal to350° C. and less than the strain point, preferably higher than or equalto 400° C. Here, after the substrate is introduced into an electricfurnace, which is one of heating apparatuses, and the oxidesemiconductor layer is subjected to heat treatment in a nitrogenatmosphere, reentry of water and hydrogen into the oxide semiconductorlayer is prevented by cooling the oxide semiconductor layer withoutbeing exposed to the air. In this manner, second oxide semiconductorlayers 113 b and 213 b are obtained (see FIG. 2B).

In this embodiment, the same furnace is used from the heatingtemperature T at which the oxide semiconductor film is subjected todehydration or dehydrogenation to a temperature sufficient to preventwater from entering again; specifically, slow cooling is performed in anitrogen atmosphere until the temperature drops by 100° C. or more fromthe heating temperature T. Moreover, without limitation to a nitrogenatmosphere, dehydration or dehydrogenation may be performed in an inertgas atmosphere such as helium, neon, or argon, or under a reducedpressure.

Note that in the first heat treatment, it is preferable that nitrogen ora rare gas such as helium, neon, or argon do not contain water,hydrogen, or the like. Alternatively, it is preferable that the purityof nitrogen or a rare gas such as helium, neon, or argon which isintroduced to the heat treatment apparatus be 6N (99.9999%) or more,more preferably 7N (99.99999%) or more (that is, the impurityconcentration is 1 ppm or lower, more preferably 0.1 ppm or lower).

The oxide semiconductor layer can be crystallized to be amicrocrystalline film or a polycrystalline film in some cases because ofconditions of the first heat treatment or materials of the oxidesemiconductor layer.

The first heat treatment for the oxide semiconductor layer can beperformed before the oxide semiconductor film is processed into theisland-shaped oxide semiconductor layers. In that case, after the firstheat treatment, the substrate is extracted from the heat treatmentapparatus, and then the second photolithography step is performed.

Before formation of the oxide semiconductor film, the substrate may besubjected to heat treatment (at higher than or equal to 400° C. andlower than the strain point of the substrate) in an inert gas atmosphere(nitrogen, helium, neon, argon or the like), an oxygen atmosphere, or areduced pressure, so that impurities such as hydrogen and water in thegate insulating layer are removed.

Next, an insulating film to be the channel protective layers is formedin contact with the second oxide semiconductor layers 113 b and 213 b.The insulating film to be the channel protective layers in contact withthe second oxide semiconductor layers 113 b and 213 b can be formedusing an oxide insulating film with a thickness of at least 1 nm by asputtering method or the like. Any method for preventing entry ofimpurities such as water and hydrogen into the oxide insulating film canbe used as appropriate.

In this embodiment, a 300-nm-thick silicon oxide film is formed by asputtering method as the oxide insulating film. The substratetemperature in the formation may be room temperature to 300° C.inclusive; in this embodiment, it is 100° C. Formation of the siliconoxide film by a sputtering method can be performed in a rare gas(typically argon) atmosphere, an oxygen atmosphere, or an atmospherecontaining a rare gas (typically argon) and oxygen. The target can be asilicon oxide target or a silicon target. For example, the silicon oxidefilm can be formed using a silicon target by a sputtering method in anatmosphere containing oxygen and nitrogen. An example of the channelprotective layer formed in contact with the low-resistant oxidesemiconductor layer is an inorganic insulating film which does notcontain impurities such as moisture, a hydrogen ion, and OH⁻ and blocksentry of them from the outside. Typically, a silicon oxide film, asilicon nitride oxide film, an aluminum oxide film, an aluminumoxynitride film, or the like can be used.

Next, a third photolithography step is performed to form a resist maskover the insulating film which is to be the channel protective layer.Then, unnecessary portions are removed by etching and the first channelprotective layer 116 and the second channel protective layer 216 areformed.

Next, second heat treatment (preferably at 200° C. to 400° C. inclusive,for example 250° C. to 350° C. inclusive) is performed in an inert gasatmosphere (see FIG. 2C). For example, the second heat treatment isperformed in a nitrogen atmosphere at 250° C. for 1 hour. In the secondheat treatment, heating is performed in the following condition: a partof the second oxide semiconductor layer 113 b is in contact with thefirst channel protective layer 116, and a part of the second oxidesemiconductor layer 213 b is in contact with the second channelprotective layer 216. The regions of the second oxide semiconductorlayer 113 b not in contact with the first channel protective layer 116,and the regions of the second oxide semiconductor layer 213 b not incontact with the first channel protective layer 216 are heated whileexposed to the inert gas atmosphere, and heating is performed in thiscondition.

Through the above steps, after the resistance of the formed oxidesemiconductor film is lowered by the heat treatment for dehydration ordehydrogenation, the channel protective layer in contact with a part ofthe oxide semiconductor film is formed using an oxide insulating film,and excessive oxygen is selectively added into the region which overlapswith the channel protective layer. As a result, the channel formationregion overlapping with the channel protective layer becomes i-type. Inthis specification, this i-type oxide semiconductor is referred to as athird oxide semiconductor. Thus, a part of the second oxidesemiconductor layer 113 b, which is subjected to the second heattreatment while in contact with the first channel protective layer 116,becomes the third oxide semiconductor layer 113 c, and a part of thesecond oxide semiconductor layer 213 b, which is subjected to the secondheat treatment while in contact with the second channel protective layer216, becomes the third oxide semiconductor layer 213 c.

On the other hand, in the regions of the second oxide semiconductorlayer 113 b not in contact with the first channel protective layer 116,and in the regions of the second oxide semiconductor layer 213 b not incontact with the first channel protective layer 216, high-resistantdrain regions are formed in a self-aligned manner. In thisspecification, these high-resistant drain regions are referred to as thefourth oxide semiconductor regions. Thus, regions of the second oxidesemiconductor layer 113 b not in contact with the first channelprotective layer 116 become the fourth oxide semiconductor regions 113d, and regions of the second oxide semiconductor layer 213 b not incontact with the second channel protective layer 216 become the fourthoxide semiconductor regions 213 d.

Next, a conductive film which transmits visible light is formed over thegate insulating film 102 and the fourth oxide semiconductor regions 113d and 213 d.

The light-transmitting conductive film is deposited by a sputteringmethod, a vacuum evaporation method (e.g., an electron beam evaporationmethod), an arc discharge ion plating method, or a spray method. As amaterial for the conductive layer, a conductive material that transmitsvisible light, for example, any of the following metal oxides can beused: an In—Sn—Zn—O-based metal oxide, an In—Al—Zn—O-based metal oxide,a Sn—Ga—Zn—O-based metal oxide, an Al—Ga—Zn—O-based metal oxide, aSn—Al—Zn—O-based metal oxide, an In—Zn—O-based metal oxide, aSn—Zn—O-based metal oxide, an Al—Zn—O-based metal oxide, an In—O-basedmetal oxide, a Sn—O-based metal oxide, and a Zn—O-based metal oxide. Thethickness is set within the range of 50 nm to 300 nm inclusive. When asputtering method is employed, it is preferable that deposition beperformed using a target containing SiO₂ of 2 to 10 percent by weightand SiOx (x>0) which inhibits crystallization be contained in thelight-transmitting conductive film so as to prevent crystallization atthe time of the heat treatment in a later step.

Next, a metal conductive film is formed over the conductive film whichtransmits visible light. Examples of the metal conductive film include:an element selected from Al, Cr, Cu, Ta, Ti, Mo, and W; an alloycontaining any of these elements as a component; an alloy containing anyof these elements in combination; and the like. A three-layer structurein which a titanium layer, an aluminum layer, and a titanium layer arestacked in this order, or a three-layer structure in which a molybdenumlayer, an aluminum layer, and a molybdenum layer are stacked in thisorder is preferable. It is needless to say that the metal conductivefilm can be a single layer, a two-layer, or a stacked structure in whichfour or more layers are stacked.

Next, a fourth photolithography step is performed to form a resist mask134, unnecessary portions of the conductive film which transmits visiblelight and the metal conductive film are removed by selective etching,and electrode layers where the conductive film which transmits visiblelight and the metal conductive film are stacked are formed (see FIG.3A).

Note that in this etching, the first channel protective layer 116 andthe second channel protective layer 216 respectively function as etchingstoppers of the third oxide semiconductor layers 113 c and 213 c; thus,the third oxide semiconductor layers 113 c and 213 c are not etched.

Since the first channel protective layer 116 is formed over the channelformation region of the third oxide semiconductor layer 113 c and thesecond channel protective layer 216 is formed over the channel formationregion of the third oxide semiconductor layer 213 c, the channelformation regions of the third oxide semiconductor layers 113 c and 213c can be protected from damages during steps (e.g., reduction inthickness by plasma or an etchant when etching is performed, oroxidation). Thus, the thin film transistors 141 and 142 can haveimproved reliability.

The resist mask may also be formed by an ink-jet method. In the casewhere the resist mask is formed by an ink-jet method, manufacture costcan be reduced because a photomask is unnecessary.

Next, after the resist mask 134 is removed, a fifth photolithographystep is performed to form a resist mask 135 covering the thin filmtransistor 141 and a wiring layer including the source and drainelectrodes (denoted by 115 a and 115 b). Next, by using the resist mask135, unnecessary conductive layers (denoted by 215 a and 215 b) areremoved by etching, resulting in source and drain electrodes having alight-transmitting property (denoted by 214 a and 214 b). At this step,the thin film transistors 141 and 142 are formed (see FIG. 3B).

Note that the reliability when a driver circuit is formed can beimproved because the fourth oxide semiconductor regions, which arehigh-resistant drain regions, are formed in regions of the oxidesemiconductor layer overlapping with the drain electrode layer or thesource electrode layer. Specifically, the conductivity can be graduallyvaried from the drain electrode layer to the fourth oxide semiconductorregion and the channel formation region. In the case where operation isperformed with the drain electrode layer connected to a wiring forsupplying a high power supply potential VDD, even when a high electricfield is applied between the gate electrode layer and the drainelectrode layer, the high electric field is not applied locally becausethe fourth oxide semiconductor regions, which are high-resistant drainregions, function as buffers; therefore, the withstand voltage of thetransistor can be improved. The fourth oxide semiconductor region, whichis a high-resistant drain region, in the oxide semiconductor layeroverlapping with the drain electrode layer can result in reduced leakagecurrent in the channel formation region when a driver circuit is formed.

Specifically, in the thin film transistor 141, the conductive layer 115b formed using the metal conductive film whose wiring resistance is low,which is the drain electrode, is electrically connected to the thirdoxide semiconductor layer 113 c, which is the channel formation regionvia the conductive layer 114 b having a light-transmitting property, thefourth oxide semiconductor region 113 d, which is a high-resistant drainregion. The conductive layer 114 b having a light-transmitting propertycan also be referred to as a low-resistant drain region (also referredto as a LRN region). In the thin film transistor 142, the conductivefilm having a light-transmitting property, the fourth oxidesemiconductor region 213 d, which is a high-resistant drain region, andthe third oxide semiconductor layer 213 c, which is the channelformation region, are connected to each other.

Next, the resist mask 135 is removed, and the first protectiveinsulating film 107 is formed over the first channel protective layer116 and the second channel protective layer 216. In the first protectiveinsulating film 107, the amount of moisture, hydrogen ions, and OH⁻ isreduced, and the first protective insulating film 107 blocks entry ofthese elements from outside. The first protective insulating film 107 isformed using an insulating inorganic material. Specifically, it can beformed using a single layer or a stacked layer of any of a silicon oxidefilm, a silicon oxynitride film, a silicon nitride oxide film, a siliconnitride film, an aluminum oxide film, an aluminum nitride film, and thelike.

Here, first, a silicon nitride film is used to form a first protectiveinsulating film 107 a in contact with the gate insulating film 102. Byusing silicon nitride films for the gate insulating film 102 and thefirst protective insulating film 107 a, the same inorganic insulatingfilms can surround the thin film transistors 141 and 142 and be incontact with each other, so that the thin film transistors are sealedmore tightly. The first protective insulating film 107 may be a stackedlayer in which a protective insulating film of a composition differentfrom that of the silicon nitride film, for example a silicon oxynitridefilm, is stacked over the silicon nitride film.

The first protective insulating film 107 can have another structure; forexample, a silicon nitride film may be stacked over a 300-nm-thicksilicon oxide film formed by a sputtering method. The substratetemperature at the formation may be room temperature to 300° C.inclusive; in this embodiment, it is 100° C. Formation of the siliconoxide film by a sputtering method can be performed in a rare gas(typically argon) atmosphere, an oxygen atmosphere, or a mixed gasatmosphere containing a rare gas (typically argon) and oxygen. Further,a silicon oxide target or a silicon target may be used as a target. Forexample, the silicon oxide film can be formed using a silicon target bya sputtering method in an atmosphere containing oxygen.

Next, the second protective insulating film 108 is formed over the firstprotective insulating film 107 to cover the thin film transistors 141and 142.

The second protective insulating film 108 covers the first channelprotective layer 116, the second channel protective layer 216, and thesource and drain electrodes (denoted by 115 a, 115 b, 214 a, and 214 b)with the first protective insulating film 107 interposed therebetween.

The second protective insulating film 108 can be formed using aphotosensitive or non-photosensitive organic material with a thicknessof 0.5 μm to 3 μm. Examples of the photosensitive or non-photosensitiveorganic material which can be used for the second protective insulatingfilm 108 include polyimide, acrylic, polyamide, polyimide amide, resist,benzocyclobutene, or a stacked layer in which these materials arestacked. In addition to such organic materials, it is also possible touse a low-dielectric constant material (a low-k material), asiloxane-based resin, PSG (phosphosilicate glass), BPSG(borophosphosilicate glass), or the like. Note that the secondprotective insulating film 108 may be formed by stacking a plurality ofinsulating films formed using these materials.

Note that the siloxane-based resin refers to a resin including a Si—O—Sibond formed using a siloxane-based material as a starting material. Thesiloxane-based resin may include as a substituent an organic group(e.g., an alkyl group or an aryl group) or a fluoro group. In addition,the organic group may include a fluoro group.

The method for the formation of the second protective insulating film108 is not limited to a particular method, and the following method ormeans can be used depending on the material: a sputtering method, an SOGmethod, spin coating, dip coating, spray coating, or a droplet dischargemethod (e.g., an inkjet method, screen printing, or offset printing); adoctor knife, a roll coater, a curtain coater, a knife coater, or thelike.

In this embodiment, photo-sensitive polyimide is deposited by a coatingmethod as the second protective insulating film 108. After polyimide isapplied on the entire surface, exposure, development, and baking areperformed to form the second protective insulating film 108 formed frompolyimide having a thickness of 1.5 μm and a flat surface.

The second protective insulating film 108 can reduce unevenness causedby structures of the thin film transistors 141 and 142 so that an uppersurface can be flat. The material is not limited to a resin, but anyother material can also be used as long as it can be deposited by amethod to make the upper surface flat (e.g., a spin coating method or areflow method).

Next, etching is performed to form an opening in the first protectiveinsulating film 107, resulting in a contact hole 125 which reaches tothe drain electrode 214 b of the thin film transistor 142.

In the case where the back-gate electrode 129 is connected to the firstbottom-gate electrode 111 in the thin film transistor 141, an opening isformed in a predetermined portion (not illustrated) in the secondprotective insulating film 108, the first protective insulating film107, and the gate insulating film 102 before a conductive film to be theback-gate electrode 129 is formed.

Next, a conductive film which transmits visible light is formed over thesecond protective insulating film 108. The conductive film whichtransmits visible light can be the same conductive film as that for thefirst bottom-gate electrode 111 and the second bottom-gate electrode211. In addition, by using the same material as that for the back-gateelectrode 129 and the pixel electrode 128, the process can be simple.

Next, a sixth photolithography step is performed to form a resist maskover the conductive film, unnecessary portions are removed by etching,and a wiring layer including the back-gate electrode 129 and the pixelelectrode 128 is formed. When the wiring layer including the back-gateelectrode 129 and the pixel electrode 128 is selectively etched to havea predetermined top surface shape, the second protective insulating film108 functions as an etching stopper.

Note that the back-gate electrode 129 may be formed to cover a regionwhich overlaps with the first channel protective layer 116 overlappingwith the third oxide semiconductor layer 113 c between the source anddrain electrodes. The narrower the back-gate electrode 129 is formed,the less parasitic capacitance becomes.

The pixel electrode 128 is connected to the drain electrode 214 b of thethin film transistor 142 through the contact hole 125 (see FIG. 3C).

In addition, the thin film transistors 141 and 142 may be subjected toheat treatment in a nitrogen atmosphere or the atmospheric atmosphere(in the air). The heat treatment is preferably performed at atemperature of lower than or equal to 350° C., and may be performed anytime after the formation of the insulating film to be the firstprotective insulating film 107. For example, the heat treatment isperformed at 350° C. for 1 hour in a nitrogen atmosphere. The heattreatment can reduce variation in electrical characteristics of the thinfilm transistors 141 and 142.

Through the above process, the thin film transistors 141 and 142illustrated in FIG. 1A can be formed.

In FIGS. 2A and 2B, before the insulating film to be the channelprotective layers are formed, oxygen radical treatment may be performedon the exposed second oxide semiconductor layers 113 b and 213 b. By theoxygen radical treatment, an exposed surface and the vicinity of theexposed surface of the oxide semiconductor layer can be modified into anoxygen-excess region. Oxygen radicals may be produced by a plasmageneration apparatus with the use of a gas containing oxygen, or by anozone generation apparatus. By irradiating the thin film with theproduced oxygen radicals or oxygen, surfaces of the second oxidesemiconductor layers 113 b and 213 b (surfaces in back channel portions)can be modified. The treatment is not limited to oxygen radicaltreatment, but may be treatment using radicals of argon and oxygen. Theargon and oxygen radical treatment is to modify a surface of a thin filmusing plasma generated by introducing argon gas and oxygen gas.

FIG. 7 illustrates thin film transistors 210 and 220 in each of whichthe gate insulating film 102 is formed using a two-layer stacked film inwhich a silicon oxide film is formed over a silicon nitride film. In thecase where the gate insulating film 102 b in contact with the oxidesemiconductor layer is a silicon oxide film, when the channel protectivelayer is formed using the silicon oxide film, the gate insulating film102 b is etched; as a result, the thickness of the gate insulating film102 b in a region which does not overlap with the island-shaped oxidesemiconductor layer becomes smaller than that of the gate insulatingfilm 102 b in a region overlapping with the island-shaped oxidesemiconductor layer.

In the thin film transistors 210 and 220, the gate insulating film 102and the first protective insulating film 107 are formed in contact witheach other by using the same inorganic insulating material. Due to thestructure in which the same inorganic insulating films surround the thinfilm transistors 210 and 220 and are in contact with each other, thethin film transistors are sealed more tightly. In the case where thesame inorganic insulating films are in contact with each other, theabove-described inorganic insulating film can be used; in particular, asilicon nitride film is preferable because it can block impuritieseffectively.

The resist mask for forming the pixel electrode 128 may also be formedby an ink-jet method. In the case where the resist mask is formed by anink-jet method, manufacturing cost can be reduced because a photomask isunnecessary.

Through the above steps, by using seven photomasks, the thin filmtransistors 141 and 142 or the thin film transistors 210 and 220 areseparately formed over the same substrate.

By providing the back-gate electrode 129 overlapping with the channelformation region of the third oxide semiconductor layer 113 c, theamount of change in threshold voltage of the thin film transistor 141before and after bias-temperature stress testing (hereinafter, referredto as BT testing) for examining reliability of a thin film transistorcan be reduced. The potential of the back-gate electrode 129 may be thesame as that of the bottom-gate electrode 111, or may be different. Inaddition, the potential of the back-gate electrode 129 may be GND, 0 V,or the back-gate electrode 129 may be in a floating state.

The channel formation region in the semiconductor layer included in thethin film transistor of this embodiment is a high-resistant region;thus, electrical characteristics of the thin film transistor arestabilized and an increase in off current and the like can be prevented.Therefore, a semiconductor device including a highly reliable thin filmtransistor having favorable electrical characteristics can be provided.

Further, in the thin film transistors 141 and 142, and the thin filmtransistors 210 and 220, since the fourth oxide semiconductor regionsare formed in the source and drain regions in contact with the sourceand drain electrodes respectively, the contact resistance is suppressedso that a high on current can be achieved.

This embodiment can be freely combined with any of the other embodimentsdescribed in this specification.

Embodiment 2

In this embodiment, described are a thin film transistor which is oneembodiment of the present invention and is different from that inEmbodiment 1, and its manufacturing method.

FIG. 4A illustrates a cross-sectional view of a thin film transistor 143and a thin film transistor 144, each of which is one embodiment of thepresent invention. The thin film transistors 143 and 144 are formed overthe same substrate 100, and both of them are bottom-gate type thin filmtransistors. The thin film transistor 143 is provided for a drivercircuit, and the thin film transistor 144 is provided for a pixel.

FIG. 4C1 is a plane view of the channel-stop-type thin film transistor143 provided for a driver circuit, and a cross-sectional view takenalong line C1-C2 in FIG. 4C1 is illustrated in FIG. 4A. Across-sectional view taken along line C3-C4 in FIG. 4C1 is illustratedin FIG. 4B.

FIG. 4C2 is a plane view of the channel-stop-type thin film transistor144 provided for a pixel, and a cross-sectional view taken along lineD1-D2 in FIG. 4C2 is illustrated in FIG. 4A. A cross-sectional viewtaken along line D3-D4 in FIG. 4C2 is illustrated in FIG. 4B.

The thin film transistor 143 includes a first bottom-gate electrode 111,a gate insulating film 102, a third oxide semiconductor layer 113 c, afirst channel protective layer 116, and source and drain electrodes eachformed over the substrate 100. Note that the source and drain electrodesare formed using a conductive layer in which a second conductive layer115 a is stacked on a first conductive layer 114 a, and a conductivelayer in which a second conductive layer 115 b is stacked on a firstconductive layer 114 b. Further, a first protective insulating film 107is formed to cover these and to be in contact with the first channelprotective layer 116. A second protective insulating film 108 is formedover the first protective insulating film 107. Furthermore, a back-gateelectrode 129 is formed over the second protective insulating film 108and it overlaps with the third oxide semiconductor layer 113 c. Inaddition, the thin film transistor 143 described in this embodiment isone embodiment of a channel-stop type.

When a pixel portion and a driver circuit are formed over one substratein a liquid crystal display device, in the driver circuit, only eitherpositive polarity or negative polarity is applied between the source anddrain electrodes in a thin film transistor for constituting a logic gatesuch as an inverter circuit, a NAND circuit, a NOR circuit, or a latchcircuit or a thin film transistor for constituting an analog circuitsuch as a sense amplifier, a constant voltage generating circuit, or aVCO. Therefore, one of the source and drain electrodes which requireswithstand voltage to the third oxide semiconductor layer 113 c may bedesigned to be wider than the other of the source and drain electrodes.In addition, the width of the third oxide semiconductor layer 113 coverlapping with the bottom-gate electrode may be increased.

A thin film transistor having a single-gate structure is described asthe thin film transistor 143 provided for a driver circuit; however, athin film transistor having a multi-gate structure in which a pluralityof channel formation regions are included can also be used as needed.

The back-gate electrode 129 is formed over and to overlap with the thirdoxide semiconductor layer 113 c. The third oxide semiconductor layer 113c is interposed between the bottom-gate electrode 111 and the back-gateelectrode 129. By electrically connecting the back-gate electrode 129and the bottom-gate electrode 111 to have the same potential, a gatevoltage can be applied to the third oxide semiconductor layer 113 c fromabove and below. When the potential of the bottom-gate electrode 111 andthat of the back-gate electrode 129 are different, for example, one ofthem has a fixed potential, GND, or 0 V, electrical characteristics ofthe TFT such as the threshold voltage can be controlled. Note that inthis specification, the conductive layer formed over and to overlap withthe third oxide semiconductor layer 113 c is referred to as theback-gate electrode 129 regardless of its potential. Therefore, theback-gate electrode 129 can also be in a floating state.

The first protective insulating film 107 and the second protectiveinsulating film 108 are stacked between the back-gate electrode 129 andthe third oxide semiconductor layer 113 c.

The thin film transistor 144 includes a second bottom-gate electrode211, the gate insulating film 102, a third oxide semiconductor layer 213c, a second channel protective layer 216, and source and drainelectrodes (denoted by 214 a and 214 b) each formed over the substrate100. Further, the first protective insulating film 107 is formed tocover these and to be in contact with the second channel protectivelayer 216. The second protective insulating film 108 is formed over thefirst protective insulating film 107. Thus, the thin film transistor 144described in this embodiment is one embodiment of a channel-stop type.Note that a pixel electrode 128 is formed over the second protectiveinsulating film 108 to overlap with the thin film transistor 144.

An AC drive is performed in the liquid crystal display device in orderto prevent deterioration of a liquid crystal. Through the AC drive, thepolarity of a signal potential applied to a pixel electrode layer isinverted to be negative or positive at regular intervals of time. In aTFT connected to the pixel electrode layer, a pair of electrodesfunctions alternately as a source electrode and a drain electrode. Inthis specification, one electrode of the pixel thin film transistor isreferred to as a source electrode and the other one is referred to as adrain electrode; actually in AC drive, one electrode functionsalternately as the source electrode and the drain electrode. In order toreduce leakage current, the second bottom-gate electrode of the thinfilm transistor 144 provided for a pixel may be narrower than the firstbottom-gate electrode of the thin film transistor 143 provided for adriver circuit. In order to reduce the leakage current, the bottom-gateelectrode of the thin film transistor 144 provided for a pixel may bedesigned so as not to overlap with the source or drain electrode.

A thin film transistor having a single-gate structure is described asthe thin film transistor 144 provided for a pixel; however, a thin filmtransistor having a multi-gate structure in which a plurality of channelformation regions are included can also be used as needed.

In the thin film transistor 144, used are: the third oxide semiconductorlayer 213 c which transmits visible light; the second bottom-gateelectrode 211 and the source and drain electrodes (denoted by 214 a and214 b) formed using a conductive film which transmits visible light; thesubstrate 100 which transmits visible light; and the second channelprotective layer 216, the first protective insulating film 107, and thesecond protective insulating film 108 which transmit visible light.Therefore, the thin film transistor 144 is a so-called transparenttransistor which transmits visible light.

The oxide semiconductor layer including the channel formation region maybe formed using an oxide material having semiconductor characteristics.Specifically, the oxide semiconductor materials described in Embodiment1 can be used.

Note that each thin film transistor of this embodiment includes thethird oxide semiconductor layer (denoted by 113 c or 213 c) in thechannel formation region.

FIGS. 5A to 5C and FIGS. 6A to 6C illustrate cross-sectional views inmanufacture of the thin film transistors 143 and 144. Note that stepsfor forming the first bottom-gate electrode 111 and the secondbottom-gate electrode 211 over the substrate 100 having an insulatingsurface, the gate insulating film 102 covering the first bottom-gateelectrode 111 and the second bottom-gate electrode 211, and the oxidesemiconductor film covering the gate insulating film 102 are the same asthose in Embodiment 1; therefore, a detailed description is omitted hereand the same reference numbers are used for the same portion illustratedin FIG. 2A.

A first oxide semiconductor film is formed over the gate insulating film102 as in Embodiment 1.

Next, a second photolithography step is performed to form a resist maskover the first oxide semiconductor film, and the first oxidesemiconductor film is etched to form island-shaped oxide semiconductorlayers 113 a and 213 a. Note that etching here is not limited to wetetching but may also be dry etching (see FIG. 5A).

Next, first heat treatment is performed on the first oxide semiconductorlayers 113 a and 213 a as in Embodiment 1. The resistance of the oxidesemiconductor layers 113 a and 213 a is lowered by the heat treatmentand slow cooling in an inert gas atmosphere or a reduced pressure. Thefirst oxide semiconductor layers 113 a and 213 a can be low-resistantsecond oxide semiconductor layers 113 b and 213 b, respectively (seeFIG. 5B).

Next, an insulating film to be the channel protective layers is formedin contact with the second oxide semiconductor layers 113 b and 213 b,as in Embodiment 1.

In this embodiment, a 300-nm-thick silicon oxide film is formed by asputtering method as the oxide insulating film.

Next, a third photolithography step is performed to form a resist maskover the insulating film which is to be the channel protective layer.Then, unnecessary portions are removed by etching and the first channelprotective layer 116 and the second channel protective layer 216 areformed.

In this embodiment, second heat treatment at 200° C. to 400° C.inclusive, preferably 200° C. to 300° C. inclusive, is performed in anoxygen gas atmosphere, a N₂O gas atmosphere, or ultra dry air (having adew point of −40° C. or lower, preferably −60° C. or lower). Forexample, the second heat treatment is performed in an oxygen atmosphereat 250° C. for 1 hour.

The resistance of the entire second oxide semiconductor layers 113 b and213 b becomes higher (see FIG. 5C).

Next, a conductive film which transmits visible light is formed over thegate insulating film 102 and the third oxide semiconductor layers 113 cand 213 c, as in Embodiment 1. A metal conductive film is formedthereover.

Next, a fourth photolithography step is performed to form a resist mask134 over the conductive film, unnecessary portions of the conductivefilm which transmits visible light and the conductive film are removedby etching, and the conductive film including source and drainelectrodes (denoted by 114 a, 114 b, 115 a, 115 b, 214 a, 214 b, 215 a,and 215 b) are formed (see FIG. 6A).

Note that in this etching, the first channel protective layer 116 andthe second channel protective layer 216 respectively function as etchingstoppers of the third oxide semiconductor layers 113 c and 213 c; thus,the third oxide semiconductor layers 113 c and 213 c are not etched.

Since the first channel protective layer 116 is formed over the channelformation region of the third oxide semiconductor layer 113 c and thesecond channel protective layer 216 is formed over the channel formationregion of the third oxide semiconductor layer 213 c, the channelformation regions of the third oxide semiconductor layers 113 c and 213c can be protected from damages during steps (e.g., reduction inthickness by plasma or an etchant when etching is performed, oroxidation). Thus, the thin film transistors 143 and 144 can haveimproved reliability.

Next, after the resist mask 134 is removed, a fifth photolithographystep is performed to form a resist mask 135 covering the thin filmtransistor 143 and a wiring layer including the source and drainelectrodes (denoted by 115 a and 115 b). Next, by using the resist mask135, unnecessary conductive layers (denoted by 215 a and 215 b) areremoved by etching, resulting in source and drain electrodes having alight-transmitting property (denoted by 214 a and 214 b).

Next, the resist mask 135 is removed. At this step, the thin filmtransistors 143 and 144 are formed (see FIG. 6B).

Then, a first protective insulating film 107 is formed over the firstchannel protective layer 116 and the second channel protective layer216, as in Embodiment 1. The first protective insulating film 107 isformed using an insulating inorganic material as a single layer or astacked layer.

The first protective insulating film 107 can have another structure; forexample, a silicon nitride film may be stacked over a 300-nm-thicksilicon oxide film formed by a sputtering method.

Next, the second protective insulating film 108 is formed over the firstprotective insulating film 107 to cover the thin film transistors 143and 144, as in Embodiment 1.

The second protective insulating film 108 covers the first channelprotective layer 116, the second channel protective layer 216, and thesource and drain electrodes (denoted by 115 a, 115 b, 214 a, and 214 b)with the first protective insulating film 107 interposed therebetween.

Next, etching is performed to form an opening in the first protectiveinsulating film 107, resulting in a contact hole 125 which reaches tothe drain electrode 214 b of the thin film transistor 144.

In the case where the back-gate electrode 129 is connected to the firstbottom-gate electrode 111 in the thin film transistor 143, an opening isformed in a predetermined portion (not illustrated) in the secondprotective insulating film 108, the first protective insulating film107, and the gate insulating film 102 before a conductive film to be theback-gate electrode 129 is formed.

Next, as in Embodiment 1, a conductive film which transmits visiblelight is formed over the second protective insulating film 108,unnecessary portions are removed by etching, and wiring layers includingthe back-gate electrode 129 and the pixel electrode 128 are formed.

Note that the back-gate electrode 129 may be formed to cover a regionwhich overlaps with the first channel protective layer 116 in contactwith the third oxide semiconductor layer 113 c between the source anddrain electrodes. The narrower the back-gate electrode 129 is formed,the less parasitic capacitance becomes.

The pixel electrode 128 is connected to the drain electrode 214 b of thethin film transistor 144 through the contact hole 125 (see FIG. 6C).

In addition, the thin film transistors 143 and 144 may be subjected toheat treatment in a nitrogen atmosphere or the atmospheric atmosphere(in the air). The heat treatment is preferably performed at atemperature of lower than or equal to 350° C., and may be performed anytime after the formation of the insulating film to be the firstprotective insulating film 107. For example, the heat treatment isperformed at 350° C. for 1 hour in a nitrogen atmosphere. The heattreatment can reduce variation in electrical characteristics of the thinfilm transistors 143 and 144.

Through the above process, the thin film transistors 143 and 144illustrated in FIG. 1A can be formed.

In FIGS. 5A and 5B, before the insulating film to be the channelprotective layers are formed, oxygen radical treatment may be performedon the exposed second oxide semiconductor layers 113 b and 213 b, as inEmbodiment 1.

FIG. 8 illustrates thin film transistors 145 and 146 in each of whichthe gate insulating film 102 is formed using a stack of a silicon oxidefilm and a silicon nitride film. When the channel protective layers 116and 216 are formed using the silicon oxide film, the silicon oxide filmin the gate insulating film 102 is etched; as a result, the thickness ofthe regions which do not overlap with the island-shaped oxidesemiconductor layer becomes smaller than that of the silicon oxide filmoverlapping with the island-shaped oxide semiconductor layer.

A resist mask for forming the pixel electrode 128 may be formed by anink-jet method. In the case where the resist mask is formed by anink-jet method, manufacture cost can be reduced because a photomask isunnecessary.

Through the above steps, by using seven photomasks, the thin filmtransistors 143 and 144 or the thin film transistors 145 and 146 areseparately formed over the same substrate.

By providing the back-gate electrode 129 overlapping with the channelformation region of the third oxide semiconductor layer 113 c, theamount of change in threshold voltage of the thin film transistor 143before and after bias-temperature stress testing (hereinafter, referredto as BT testing) for examining reliability of a thin film transistorcan be reduced. The potential of the back-gate electrode 129 may be thesame as that of the bottom-gate electrode 111, or may be different. Inaddition, the potential of the back-gate electrode 129 may be GND, 0 V,or the back-gate electrode 129 may be in a floating state.

The channel formation region in the semiconductor layer included in thethin film transistor of this embodiment is a high-resistant region;thus, electrical characteristics of the thin film transistor arestabilized and an increase in off current and the like can be prevented.Therefore, a semiconductor device including a highly reliable thin filmtransistor having favorable electrical characteristics can be provided.

This embodiment can be freely combined with any of the other embodimentsdescribed in this specification.

Embodiment 3

This embodiment will show an example of manufacturing an active matrixliquid crystal display device with the active matrix substrate describedin Embodiment 1.

FIG. 9A illustrates an example of a cross-sectional structure of anactive matrix substrate.

The thin film transistor in the driver circuit and the thin filmtransistor in the pixel portion over one substrate are shown inEmbodiment 1; in this embodiment, terminal portions of a storagecapacitor, a gate wiring (also referred to as a gate wiring layer), anda source wiring (also referred to as a source wiring layer) are shown inaddition to these thin film transistors for description. The terminalportions of the capacitor, the gate wiring, and the source wiring can beformed in the same manufacturing step as in Embodiment 1 and can bemanufactured without an increase in the number of photomasks and anincrease in the number of steps. Moreover, in a portion to serve as adisplay region in a pixel portion, all the gate wiring, the sourcewiring, and a capacitor wiring layer are formed from alight-transmitting conductive film, resulting in high aperture ratio.Furthermore, a metal wiring can be used for the source wiring layer in aportion that is not the display region in order to reduce the wiringresistance.

In FIG. 9A, a thin film transistor 210 is a channel-stop-type thin filmtransistor provided for a driver circuit. A thin film transistor 220that is electrically connected to a pixel electrode layer 227 is achannel-stop-type thin film transistor provided for a pixel portion.

In this embodiment, the thin film transistor 220 formed over a substrate200 has the same structure as the thin film transistor 220 inEmbodiment 1. Note that a first protective insulating layer 203 may be asingle layer or a stacked layer.

A capacitor wiring layer 230 which is formed from the samelight-transmitting material in the same step as a gate electrode layerof the thin film transistor 220 overlaps with a capacitor electrode 231,with a first gate insulating layer 202 a and a second gate insulatinglayer 202 b serving as dielectrics placed therebetween; thus, a storagecapacitor is formed. The capacitor electrode 231 is formed from the samelight-transmitting material in the same step as a source electrode layeror a drain electrode layer of the thin film transistor 220. Since thestorage capacitor as well as the thin film transistor 220 haslight-transmitting property, the aperture ratio can be increased.

The light transmittance of the storage capacitor is important inincreasing the aperture ratio. For small liquid crystal display panelsof 10 inches or smaller in particular, high aperture ratio can also beachieved when the size of a pixel is decreased in order to realizehigher definition of display images by increasing the number of gatewirings, for example. Moreover, wide viewing angle is realized by usinga light-transmitting film for components in the thin film transistor 220and the storage capacitor, so that high aperture ratio can also beachieved when one pixel is divided into a plurality of subpixels. Thatis, high aperture ratio can be maintained even when a group ofhigh-density thin film transistors is arranged, and the display regioncan have a sufficient area. For example, when one pixel includes two tofour subpixels and storage capacitors, the storage capacitors have lighttransmittance as well as the thin film transistors, so that the apertureratio can be increased.

Note that the storage capacitor is provided below the pixel electrodelayer 227, and the capacitor electrode 231 is electrically connected tothe pixel electrode layer 227.

This embodiment shows the example in which the storage capacitor isconstituted by the capacitor electrode 231 and the capacitor wiringlayer 230; however, there is no particular limitation on the structureof the storage capacitor. For example, a storage capacitor may be formedin such a manner that, without providing a capacitor wiring layer, apixel electrode layer overlaps with a gate wiring in an adjacent pixel,with a planarization insulating layer, a protective insulating layer, afirst gate insulating layer, and a second gate insulating layer placedtherebetween.

A plurality of gate wirings, source wirings, and capacitor wiring layersare provided in accordance with the pixel density. In the terminalportions, a plurality of first terminal electrodes at the same potentialas the gate wiring, a plurality of second terminal electrodes at thesame potential as the source wiring, a plurality of third terminalelectrodes at the same potential as the capacitor wiring layer, and thelike are arranged. There is no particular limitation on number of eachof the terminal electrodes, and the number of the terminals can bedetermined by a practitioner as appropriate.

In the terminal portion, the first terminal electrode which has the samepotential as the gate wiring can be formed from the samelight-transmitting material as the pixel electrode layer 227. The firstterminal electrode is electrically connected to the gate wiring througha contact hole that reaches the gate wiring. The contact hole thatreaches the gate wiring is formed by selective etching of a secondprotective insulating layer 204, the first protective insulating layer203, the second gate insulating layer 202 b, and the first gateinsulating layer 202 a with the use of a photomask used for forming acontact hole for electrically connecting the drain electrode layer ofthe thin film transistor 220 and the pixel electrode layer 227.

A gate electrode layer of the thin film transistor 210 provided for thedriver circuit may be electrically connected to a conductive layer 217provided above an oxide semiconductor layer. In that case, a contacthole is formed by selective etching of the second protective insulatinglayer 204, the first protective insulating layer 203, the second gateinsulating layer 202 b, and the first gate insulating layer 202 a withthe use of the photomask used for forming the contact hole forelectrically connecting the drain electrode layer of the thin filmtransistor 220 and the pixel electrode layer 227. The conductive layer217 and the gate electrode layer of the thin film transistor 210provided for the driver circuit are electrically connected through thecontact hole.

A second terminal electrode 235 which has the same potential as a sourcewiring 234 in the driver circuit can be formed from the samelight-transmitting material as the pixel electrode layer 227. The secondterminal electrode 235 is electrically connected to the source wiring234 through a contact hole that reaches the source wiring 234. Thesource wiring is a metal wiring, is formed from the same material in thesame step as a source electrode layer of the thin film transistor 210,and has the same potential as the source electrode layer of the thinfilm transistor 210.

The third terminal electrode which has the same potential as thecapacitor wiring layer 230 can be formed from the samelight-transmitting material as the pixel electrode layer 227. Moreover,a contact hole that reaches the capacitor wiring layer 230 can be formedin the same step using the same photomask as those for forming a contacthole 224 for electrically connecting the capacitor electrode 231 to thepixel electrode layer 227.

In the case of manufacturing an active matrix liquid crystal displaydevice, a liquid crystal layer is provided between an active matrixsubstrate and a counter substrate provided with a counter electrode(also referred to as a counter electrode layer), and the active matrixsubstrate and the counter substrate are fixed to each other. A commonelectrode electrically connected to the counter electrode on the countersubstrate is provided over the active matrix substrate, and a fourthterminal electrode electrically connected to the common electrode isprovided in the terminal portion. The fourth terminal electrode is usedfor setting the common electrode to a fixed potential such as GND or 0V. The fourth terminal electrode can be formed from the samelight-transmitting material as the pixel electrode layer 227.

There is no particular limitation on the structure where the sourceelectrode layer of the thin film transistor 220 and the source electrodelayer of the thin film transistor 210 are electrically connected to eachother; for example, a connection electrode for connecting the sourceelectrode layer of the thin film transistor 220 and the source electrodelayer of the thin film transistor 210 may be formed in the same step asthe pixel electrode layer 227. Furthermore, in the portion that is notthe display region, the source electrode layer of the thin filmtransistor 220 and the source electrode layer of the thin filmtransistor 210 may be in contact with each other to overlap with eachother.

Note that FIG. 9A illustrates a cross-sectional structure of a gatewiring layer 232 in the driver circuit. Since this embodiment shows anexample of a small liquid crystal display panel of 10 inches or smaller,the gate wiring layer 232 in the driver circuit is formed from the samelight-transmitting material as the gate electrode layer of the thin filmtransistor 220.

When the same material is used for the gate electrode layer, the sourceelectrode layer, the drain electrode layer, the pixel electrode layer,another electrode layer, and another wiring layer, a common sputteringtarget and a common manufacturing apparatus can be used, and thus thematerial costs and costs of an etchant (or an etching gas) used foretching can be reduced. As a result, manufacturing costs can be reduced.

When a photosensitive resin material is used for the second protectiveinsulating layer 204 in the structure in FIG. 9A, the step for forming aresist mask can be omitted.

FIG. 9B illustrates a cross-sectional structure, a part of which isdifferent from the structure in FIG. 9A. FIG. 9B is the same as FIG. 9Aexcept that the second protective insulating layer 204 is not provided;therefore, the same portions are denoted by the same reference numeralsand detailed description of the same portions is not repeated. In FIG.9B, the pixel electrode layer 227, the conductive layer 217, and thesecond terminal electrode 235 are formed on and in contact with thefirst protective insulating layer 203.

With the structure in FIG. 9B, the step for forming the secondprotective insulating layer 204 can be omitted.

This embodiment can be freely combined with any of the otherembodiments.

Embodiment 4

This embodiment will show an example in which a part of a gate wiring ismade from a metal wiring so that the wiring resistance is reduced,because there is the possibility that the resistance of alight-transmitting wiring might become a problem in the case where thesize of a liquid crystal display panel exceeds 10 inches and reaches 60inches or 120 inches.

Note that in FIG. 10A, the same portions as those in FIG. 9A are denotedby the same reference numerals and detailed description of the sameportions is not repeated.

FIG. 10A illustrates an example in which a part of a gate wiring in adriver circuit is made from a metal wiring and formed in contact with alight-transmitting wiring which is the same as the gate electrode layerof a thin film transistor 210. Note that the number of photomasks islarger than that in Embodiment 3 since the metal wiring is formed.

First, a heat-resistant conductive material film (with a thickness of100 nm to 500 nm inclusive) that can withstand first heat treatment fordehydration or dehydrogenation is formed over a substrate 200.

In this embodiment, a 370-nm-thick tungsten film and a 50-nm-thicktantalum nitride film are formed. Although a stack of the tantalumnitride film and the tungsten film is used as the conductive film here,there is no particular limitation and the conductive film may be formedfrom an element selected from Ta, W, Ti, Mo, Al, and Cu; an alloycontaining any of these elements as its component; an alloy containing acombination of any of these elements; or a nitride containing any ofthese elements as its component. The heat-resistant conductive materialfilm is not limited to a single layer containing the above-describedelement, but may be a stack of two or more layers.

In a first photolithography step, metal wirings are formed, so that afirst metal wiring layer 236 and a second metal wiring layer 237 areformed. An inductively coupled plasma (ICP) etching method is preferablyused for etching of the tungsten film and the tantalum nitride film. Thefilms can be etched into a desired tapered shape with the ICP etchingmethod with appropriate adjustment of etching conditions (e.g., theamount of electric power applied to a coiled electrode, the amount ofelectric power applied to a substrate-side electrode, and thetemperature of the substrate-side electrode). The first metal wiringlayer 236 and the second metal wiring layer 237 are tapered; thus,defects in formation of a light-transmitting conductive film thereon canbe reduced.

Then, after the light-transmitting conductive film is formed, a gatewiring layer 238, a gate electrode layer of the thin film transistor210, a gate electrode layer of a thin film transistor 220, and acapacitor wiring layer 230 are formed in a second photolithography step.The light-transmitting conductive film is formed using any of theconductive materials that transmit visible light described in Embodiment1.

Note that for example, when there is an interface where the gate wiringlayer 238 is in contact with the first metal wiring layer 236 or thesecond metal wiring layer 237, it is possible that, depending on thematerial of the light-transmitting conductive film, an oxide film isformed with later heat treatment or the like, and contact resistance isincreased. Consequently, the second metal wiring layer 237 is preferablyformed from a metal nitride film that prevents oxidation of the firstmetal wiring layer 236.

Next, a gate insulating layer, an oxide semiconductor layer, and thelike are formed in the same step as in Embodiment 1. An active matrixsubstrate is formed in accordance with the subsequent steps inEmbodiment 1.

This embodiment shows an example in which after formation of a secondprotective insulating layer 204, a planarization insulating layer in aterminal portion is selectively removed using a photomask. It ispreferable that the planarization insulating layer be not placed in theterminal portion so that the terminal portion can be connected to an FPCin a favorable manner.

In FIG. 10A, a second terminal electrode 235 is formed over a firstprotective insulating layer 203. FIG. 10A illustrates the gate wiringlayer 238 which overlaps with a part of the second metal wiring layer237; alternatively, the gate wiring layer may cover all the first metalwiring layer 236 and the second metal wiring layer 237. In other words,the first metal wiring layer 236 and the second metal wiring layer 237can be referred to as auxiliary wirings for reducing the resistance ofthe gate wiring layer 238.

In the terminal portion, a first terminal electrode that has the samepotential as the gate wiring is formed over the first protectiveinsulating layer 203 and electrically connected to the second metalwiring layer 237. A wiring led from the terminal portion is also formedusing a metal wiring.

Furthermore, in order to reduce the wiring resistance, the metal wirings(i.e., the first metal wiring layer 236 and the second metal wiringlayer 237) can be used as the auxiliary wirings for the gate wiringlayer and a capacitor wiring layer in a portion that does not serve as adisplay region.

FIG. 10B illustrates a cross-sectional structure, a part of which isdifferent from the structure in FIG. 10A. FIG. 10B is the same as FIG.10A except for a material of the gate electrode layer in the thin filmtransistor in the driver circuit; therefore, the same portions aredenoted by the same reference numerals and detailed description of thesame portions is not repeated.

FIG. 10B illustrates an example in which the gate electrode layer in thethin film transistor in the driver circuit is made from a metal wiring.In the driver circuit, a material of the gate electrode layer is notlimited to a light-transmitting material.

In FIG. 10B, a thin film transistor 240 in the driver circuit includes agate electrode layer in which a second metal wiring layer 241 is stackedover a first metal wiring layer 242. Note that the first metal wiringlayer 242 can be formed from the same material in the same step as thefirst metal wiring layer 236. Moreover, the second metal wiring layer241 can be formed from the same material in the same step as the secondmetal wiring layer 237.

In the case where the first metal wiring layer 242 is electricallyconnected to a conductive layer 217, it is preferable to use a metalnitride film as the second metal wiring layer 241 for preventingoxidation of the first metal wiring layer 242.

In this embodiment, metal wirings are used for some wirings so that thewiring resistance is reduced; high definition of display images isachieved and high aperture ratio can be realized even when the size of aliquid crystal display panel exceeds 10 inches and reaches 60 inches or120 inches.

This embodiment can be freely combined with any of the otherembodiments.

Embodiment 5

In this embodiment, an example of a structure of a storage capacitorwhich is different from that in Embodiment 3 will be shown withreference to FIGS. 11A and 11B. FIG. 11A is the same as FIG. 9A exceptfor a structure of the storage capacitor; therefore, the same portionsare denoted by the same reference numerals and detailed description ofthe same portions is not repeated. FIG. 11A illustrates across-sectional structure of a thin film transistor 220 provided for apixel and a storage capacitor.

FIG. 11A illustrates an example in which the storage capacitor isconstituted by a pixel electrode layer 227 and a capacitor wiring layer250 that overlaps with the pixel electrode layer 227, with a channelprotective layer 216 formed using an oxide insulating layer, a firstprotective insulating layer 203, and a second protective insulatinglayer 204 serving as dielectrics. Since the capacitor wiring layer 250is formed from the same light-transmitting material in the same step asthe source electrode layer of the thin film transistor 220 provided forthe pixel, the capacitor wiring layer 250 is arranged so as not tooverlap with a source wiring layer of the thin film transistor 220.

In the storage capacitor illustrated in FIG. 11A, a pair of electrodesand the dielectrics have light-transmitting properties, and thus thestorage capacitor as a whole has a light-transmitting property.

FIG. 11B illustrates an example of a structure of the storage capacitorwhich is different from that in FIG. 11A. FIG. 11B is the same as FIG.11A except for a structure of the storage capacitor; therefore, the sameportions are denoted by the same reference numerals and detaileddescription of the same portions is not repeated.

FIG. 11B illustrates an example in which the storage capacitor isconstituted by the capacitor wiring layer 230 and a stack of an oxidesemiconductor layer 251 that overlaps with the capacitor wiring layer230 and the capacitor electrode 231 with a first gate insulating layer202 a and a second gate insulating layer 202 b serving as dielectrics.The capacitor electrode 231 is stacked on and in contact with the oxidesemiconductor layer 251 and functions as one electrode of the storagecapacitor. Note that the oxide semiconductor layer 251 is formed fromthe same light-transmitting material in the same step as the sourceelectrode or the drain electrode of the thin film transistor 220.Moreover, since the capacitor wiring layer 230 is formed from the samelight-transmitting material in the same step as the gate electrode ofthe thin film transistor 220, the capacitor wiring layer 230 is arrangedso as not to overlap with a gate wiring layer of the thin filmtransistor 220.

The capacitor electrode 231 is electrically connected to the pixelelectrode layer 227.

Also in the storage capacitor illustrated in FIG. 11B, a pair ofelectrodes and the dielectrics have light-transmitting properties, andthus the storage capacitor as a whole has a light-transmitting property.

Each of the storage capacitors illustrated in FIGS. 11A and 11B haslight-transmitting properties; thus, sufficient capacitance and highaperture ratio can be obtained even when the size of a pixel isdecreased in order to realize higher definition of display images byincreasing the number of gate wirings, for example.

This embodiment can be freely combined with any of the otherembodiments.

Embodiment 6

In this embodiment, described below is an example in which at least someof driver circuits and a thin film transistor placed in a pixel portionare formed over one substrate.

The thin film transistor placed in the pixel portion is formed accordingto Embodiment 1 or Embodiment 2. Since the thin film transistordescribed in Embodiment 1 or Embodiment 2 is an n-channel TFT, some ofdriver circuits that can be constituted by n-channel TFTs among thedriver circuits are formed over a substrate where the thin filmtransistor in the pixel portion is formed.

FIG. 16A illustrates an example of a block diagram of an active matrixdisplay device. A pixel portion 5301, a first scan line driver circuit5302, a second scan line driver circuit 5303, and a signal line drivercircuit 5304 are provided over a substrate 5300 in the display device.In the pixel portion 5301, a plurality of signal lines extended from thesignal line driver circuit 5304 are placed, and a plurality of scanlines extended from the first scan line driver circuit 5302 and thesecond scan line driver circuit 5303 are placed. Note that pixels eachincluding a display element are arranged in matrix in respective regionswhere the scan lines and the signal lines intersect with each other. Thesubstrate 5300 of the display device is connected to a timing controlcircuit 5305 (also referred to as a controller or a control IC) througha connection portion such as a flexible printed circuit (FPC).

In FIG. 16A, the first scan line driver circuit 5302, the second scanline driver circuit 5303, and the signal line driver circuit 5304 areformed over the substrate 5300 where the pixel portion 5301 is formed.Consequently, the number of components of a driver circuit and the likeexternally provided is reduced, so that costs can be reduced. Moreover,the number of connections in the connection portion in the case wherewirings are extended from a driver circuit provided outside thesubstrate 5300 can be reduced, and the reliability or yield can beincreased.

Note that the timing control circuit 5305 supplies, for example, a firstscan line driver circuit start signal (GSP1) (a start signal is alsoreferred to as a start pulse) and a scan line driver circuit clocksignal (GCK1) to the first scan line driver circuit 5302. Furthermore,the timing control circuit 5305 supplies, for example, a second scanline driver circuit start signal (GSP2) and a scan line driver circuitclock signal (GCK2) to the second scan line driver circuit 5303.Moreover, the timing control circuit 5305 supplies a signal line drivercircuit start signal (SSP), a signal line driver circuit clock signal(SCK), video signal data (DATA, also simply referred to as a videosignal), and a latch signal (LAT) to the signal line driver circuit5304. Each clock signal may be a plurality of clock signals with shiftedphases or may be supplied together with a signal (CKB) obtained byinverting the clock signal. Note that it is possible to omit either thefirst scan line driver circuit 5302 or the second scan line drivercircuit 5303.

FIG. 16B illustrates a structure in which circuits with lower drivingfrequency (e.g., the first scan line driver circuit 5302 and the secondscan line driver circuit 5303) are formed over the substrate 5300 wherethe pixel portion 5301 is formed, and the signal line driver circuit5304 is formed over a substrate which is different from the substrate5300 where the pixel portion 5301 is formed. With this structure, thedriver circuits formed over the substrate 5300 can be constituted bythin film transistors whose field effect mobility is lower than that oftransistors including a single crystal semiconductor. Thus, increase inthe size of the display device, reduction in the number of steps,reduction in cost, improvement in yield, or the like can be achieved.

The thin film transistors in Embodiment 1 or Embodiment 2 are n-channelTFTs. FIGS. 17A and 17B illustrate an example of a structure andoperation of a signal line driver circuit constituted by n-channel TFTs.

The signal line driver circuit includes a shift register 5601 and aswitching circuit 5602. The switching circuit 5602 includes a pluralityof switching circuits 5602_1 to 5602_N (N is a natural number). Theswitching circuits 5602_1 to 5602_N each include a plurality of thinfilm transistors 5603_1 to 5603 _(—) k (k is a natural number). Theexample in which the thin film transistors 5603_1 to 5603 _(—) k aren-channel TFTs is described below.

A connection relation in the signal line driver circuit is described byusing the switching circuit 5602_1 as an example. First terminal of thethin film transistors 5603_1 to 5603 _(—) k are connected to wirings5604_1 to 5604 _(—) k, respectively. Second terminals of the thin filmtransistors 5603_1 to 5603 _(—) k are connected to signal lines S1 toSk, respectively. Gates of the thin film transistors 5603_1 to 5603 _(—)k are connected to a wiring 5605_1.

The shift register 5601 has a function of sequentially selecting theswitching circuits 5602_1 to 5602_N by sequentially outputting anH-level signal (also referred to as an H signal or a signal at highpower supply potential level) to wirings 5605_1 to 5605_N.

The switching circuit 5602_1 has a function of controlling a conductionstate between the wirings 5604_1 to 5604 _(—) k and the signal lines S1to Sk (electrical continuity between the first terminals and the secondterminals), that is, a function of controlling whether potentials of thewirings 5604_1 to 5604 _(—) k are supplied to the signal lines S1 to Sk.In this manner, the switching circuit 5602_1 functions as a selector.Moreover, the thin film transistors 5603_1 to 5603 _(—) k have functionsof controlling conduction states between the wirings 5604_1 to 5604 _(—)k and the signal lines S1 to Sk, respectively, that is, functions ofsupplying potentials of the wirings 5604_1 to 5604 _(—) k to the signallines S1 to Sk, respectively. In this manner, each of the thin filmtransistors 5603_1 to 5603 _(—) k functions as a switch.

The video signal data (DATA) is input to each of the wirings 5604_1 to5604 _(—) k. The video signal data (DATA) is often an analog signal thatcorresponds to an image signal or image data.

Next, the operation of the signal line driver circuit in FIG. 17A isdescribed with reference to a timing chart in FIG. 17B. FIG. 17Billustrates examples of signals Sout_1 to Sout_N and signals Vdata_1 toVdata_k. The signals Sout_1 to Sout_N are examples of output signalsfrom the shift register 5601. The signals Vdata_1 to Vdata_(—) k areexamples of signals input to the wirings 5604_1 to 5604 _(—) k. Notethat one operation period of the signal line driver circuit correspondsto one gate selection period in a display device. For example, one gateselection period is divided into periods T1 to TN. Each of the periodsT1 to TN is a period for writing the video signal data (DATA) into apixel in a selected row.

In the periods T1 to TN, the shift register 5601 sequentially outputs anH-level signals to the wirings 5605_1 to 5605_N. For example, in theperiod T1, the shift register 5601 outputs an H-level signal to thewiring 5605_1. Then, the thin film transistors 5603_1 to 5603 _(—) k areturned on, so that the wirings 5604_1 to 5604 _(—) k and the signallines S1 to Sk are brought into conduction. At this time, Data(S1) toData(Sk) are input to the wirings 5604_1 to 5604 _(—) k, respectively.The Data(S1) to Data(Sk) are written into pixels in a first to kthcolumns in a selected row through the thin film transistors 5603_1 to5603 _(—) k, respectively. In such a manner, in the periods T1 to TN,the video signal data (DATA) are sequentially written into the pixels inthe selected row by k columns.

The video signal data (DATA) are written into pixels by a plurality ofcolumns as described above, whereby the number of video signal data(DATA) or the number of wirings can be reduced. Consequently, the numberof connections with an external circuit can be reduced. Moreover, thetime for writing can be extended when video signals are written intopixels by a plurality of columns; thus, insufficient writing of videosignals can be prevented.

Note that any of the circuits constituted by the thin film transistorsdescribed in Embodiment 1 or Embodiment 2 can be used for the shiftregister 5601 and the switching circuit 5602. In that case, the shiftregister 5601 can be constituted by only n-channel transistors or onlyp-channel transistors.

One embodiment of a shift register which is used for a part of the scanline driver circuit and/or the signal line driver circuit is describedwith reference to FIGS. 18A to 18C and FIGS. 19A and 19B.

The scan line driver circuit includes a shift register. Additionally,the scan line driver circuit may include a level shifter, a buffer, orthe like in some cases. In the scan line driver circuit, a clock signal(CK) and a start pulse signal (SP) are input to the shift register, sothat a selection signal is generated. The selection signal generated isbuffered and amplified by the buffer, and the resulting signal issupplied to a corresponding scan line. Gate electrodes of transistors inpixels of one line are connected to a scan line. Since the transistorsin the pixels of one line have to be turned on all at once, a bufferthat can supply a large current is used.

The shift register includes a first pulse output circuit 10_1 to a Nthpulse output circuits 10_N(N is a natural number greater than or equalto 3) (see FIG. 18A). In the shift register illustrated in FIG. 18A, afirst clock signal CK1, a second clock signal CK2, a third clock signalCK3, and a fourth clock signal CK4 are respectively supplied from afirst wiring 11, a second wiring 12, a third wiring 13, and a fourthwiring 14, to the first pulse output circuit 10_1 to the Nth pulseoutput circuit 10_N. A start pulse SP1 (a first start pulse) is inputfrom a fifth wiring 15 to the first pulse output circuit 10_1. To thenth pulse output circuit 10 _(—) n of the second or subsequent stage (nis a natural number greater than or equal to 2 and less than or equal toN), a signal from the pulse output circuit of the previous stage (such asignal is referred to as a previous-stage signal OUT(n−1)) (n is anatural number greater than or equal to 2) is input. To the first pulseoutput circuit 10_1, a signal from the third pulse output circuit 10_3of the stage following the next stage is input. Similarly, to the nthpulse output circuit 10 _(—) n of the second or subsequent stage, asignal from the (n+2)th pulse output circuit 10_(n+2) of the stagefollowing the next stage (such a signal is referred to as asubsequent-stage signal OUT(n+2)) is input. Therefore, the pulse outputcircuits of the respective stages output first output signals(OUT(1)(SR) to OUT(N)(SR)) to be input to the pulse output circuit ofthe respective subsequent stage and/or the pulse output circuit of thestage before the previous stage and second output signals (OUT(1) toOUT(N)) to be input to another wiring or the like. Note that since thesubsequent-stage signal OUT(n+2) is not input to the last two stages ofthe shift register as illustrated in FIG. 18A, a second start pulse SP2and a third start pulse SP3 may be additionally input to the pulseoutput circuits of the last two stages, for example.

Note that a clock signal (CK) is a signal that alternates between anH-level and an L-level (also referred to as an L signal or a signal atlow power supply potential level) at regular intervals. Here, the firstclock signal (CK1) to the fourth clock signal (CK4) are delayed by ¼cycle sequentially. In this embodiment, driving of the pulse outputcircuit is controlled with the first to fourth clock signals (CK1) to(CK4). Note that in some cases, the clock signal is also referred to asGCK or SCK, depending on a driver circuit to which the clock signal isinput; in the following description, the clock signal is expressed asCK.

A first input terminal 21, a second input terminal 22, and a third inputterminal 23 are electrically connected to any of the first to fourthwirings 11 to 14. For example, in the first pulse output circuit 10_1 inFIG. 18A, the first input terminal 21 is electrically connected to thefirst wiring 11, the second input terminal 22 is electrically connectedto the second wiring 12, and the third input terminal 23 is electricallyconnected to the third wiring 13. In the second pulse output circuit102, the first input terminal 21 is electrically connected to the secondwiring 12, the second input terminal 22 is electrically connected to thethird wiring 13, and the third input terminal 23 is electricallyconnected to the fourth wiring 14.

Each of the first pulse output circuit 10_1 to the Nth pulse outputcircuit 10_N includes the first input terminal 21, the second inputterminal 22, the third input terminal 23, a fourth input terminal 24, afifth input terminal 25, a first output terminal 26, and a second outputterminal 27 (see FIG. 18B). In the first pulse output circuit 10_1, thefirst clock signal CK1 is input to the first input terminal 21; thesecond clock signal CK2 is input to the second input terminal 22; thethird clock signal CK3 is input to the third input terminal 23; a startpulse is input to the fourth input terminal 24; a subsequent-stagesignal OUT(3) is input to the fifth input terminal 25; the first outputsignal OUT(1)(SR) is output from the first output terminal 26; and thesecond output signal OUT(1) is output from the second output terminal27.

In the first pulse output circuit 10_1 to the Nth pulse output circuit10_N, the thin film transistor (TFT) having four terminals described inthe above embodiment can be used in addition to a thin film transistorhaving three terminals. Note that in this specification, when a thinfilm transistor has two gate electrodes with a semiconductor layertherebetween, the gate electrode below the semiconductor layer is calleda lower gate electrode and the gate electrode above the semiconductorlayer is called an upper gate electrode.

When an oxide semiconductor is used for a semiconductor layer includinga channel formation region in a thin film transistor, the thresholdvoltage sometimes shifts in the positive or negative direction dependingon a manufacturing process. For that reason, the thin film transistor inwhich an oxide semiconductor is used for a semiconductor layer includinga channel formation region preferably has a structure with which thethreshold voltage can be controlled. The threshold voltage of a thinfilm transistor with four terminals can be controlled to be a desiredvalue by controlling a potential of the upper gate electrode and/or thelower gate electrode.

Next, an example of a specific circuit configuration of the pulse outputcircuit illustrated in FIG. 18B will be described with reference to FIG.18C.

The pulse output circuit illustrated in FIG. 18C includes a firsttransistor 31 to thirteenth transistor 43. A signal or a power supplypotential is supplied to the first transistor 31 to the thirteenthtransistor 43 from a power supply line 51 to which a first high powersupply potential VDD is supplied, a power supply line 52 to which asecond high power supply potential VCC is supplied, and a power supplyline 53 to which a low power supply potential VSS is supplied, inaddition to the above-described first input terminal 21 to fifth inputterminal 25, the first output terminal 26, and the second outputterminal 27, which are described above. The relation of the power supplypotentials of the power supply lines in FIG. 18C is as follows: thefirst power supply potential VDD is higher than or equal to the secondpower supply potential VCC, and the second power supply potential VCC ishigher than the third power supply potential VSS. Note that the firstclock signal (CK1) to the fourth clock signal (CK4) each alternatebetween an H-level and an L-level at regular intervals; the clock signalat the H level is VDD, and the clock signal at the L level is VSS. Bymaking the potential VDD of the power supply line 51 higher than thepotential VCC of the power supply line 52, a potential applied to a gateelectrode of a transistor can be lowered, shift in the threshold voltageof the transistor can be reduced, and degradation of the transistor canbe suppressed without an adverse effect on the operation of thetransistor. A thin film transistor with four terminals is preferablyused as the first transistor 31 and the sixth transistor 36 to the ninthtransistor 39 among the first transistor 31 to the thirteenth transistor43. The first transistor 31 and the sixth transistor 36 to the ninthtransistor 39 need to be operated so that a potential of a node to whichone electrode serving as a source or a drain is connected is switchedwith a control signal of the gate electrode, and can further reduce amalfunction of the pulse output circuit since response to the controlsignal input to the gate electrode is fast (the rise of on-state currentis steep). Thus, by using the thin film transistor with four terminals,the threshold voltage can be controlled, and a malfunction of the pulseoutput circuit can be further reduced.

In FIG. 18C, a first terminal of the first transistor 31 is electricallyconnected to the power supply line 51, a second terminal of the firsttransistor 31 is electrically connected to a first terminal of the ninthtransistor 39, and a gate electrode of the first transistor 31 iselectrically connected to the fourth input terminal 24. A first terminalof the second transistor 32 is electrically connected to the powersupply line 53, a second terminal of the second transistor 32 iselectrically connected to the first terminal of the ninth transistor 39,and a gate electrode of the second transistor 32 is electricallyconnected to a gate electrode of the fourth transistor 34. A firstterminal of the third transistor 33 is electrically connected to thefirst input terminal 21, and a second terminal of the third transistor33 is electrically connected to the first output terminal 26. A firstterminal of the fourth transistor 34 is electrically connected to thepower supply line 53, and a second terminal of the fourth transistor 34is electrically connected to the first output terminal 26. A firstterminal of the fifth transistor 35 is electrically connected to thepower supply line 53, a second terminal of the fifth transistor 35 iselectrically connected to the gate electrode of the second transistor 32and the gate electrode of the fourth transistor 34, and a gate electrodeof the fifth transistor 35 is electrically connected to the fourth inputterminal 24. A first terminal of the sixth transistor 36 is electricallyconnected to the power supply line 52, a second terminal of the sixthtransistor 36 is electrically connected to the gate electrode of thesecond transistor 32 and the gate electrode of the fourth transistor 34,and a gate electrode of the sixth transistor 36 is electricallyconnected to the fifth input terminal 25. A first terminal of theseventh transistor 37 is electrically connected to the power supply line52, a second terminal of the seventh transistor 37 is electricallyconnected to a second terminal of the eighth transistor 38, and a gateelectrode of the seventh transistor 37 is electrically connected to thethird input terminal 23. A first terminal of the eighth transistor 38 iselectrically connected to the gate electrode of the second transistor 32and the gate electrode of the fourth transistor 34, and a gate electrodeof the eighth transistor 38 is electrically connected to the secondinput terminal 22. The first terminal of the ninth transistor 39 iselectrically connected to the second terminal of the first transistor 31and the second terminal of the second transistor 32, a second terminalof the ninth transistor 39 is electrically connected to the gateelectrode of the third transistor 33 and a gate electrode of the tenthtransistor 40, and a gate electrode of the ninth transistor 39 iselectrically connected to the power supply line 52. A first terminal ofthe tenth transistor 40 is electrically connected to the first inputterminal 21, a second terminal of the tenth transistor 40 iselectrically connected to the second output terminal 27, and the gateelectrode of the tenth transistor 40 is electrically connected to thesecond terminal of the ninth transistor 39. A first terminal of theeleventh transistor 41 is electrically connected to the power supplyline 53, a second terminal of the eleventh transistor 41 is electricallyconnected to the second output terminal 27, and a gate electrode of theeleventh transistor 41 is electrically connected to the gate electrodeof the second transistor 32 and the gate electrode of the fourthtransistor 34. A first terminal of the twelfth transistor 42 iselectrically connected to the power supply line 53, a second terminal ofthe twelfth transistor 42 is electrically connected to the second outputterminal 27, and a gate electrode of the twelfth transistor 42 iselectrically connected to the gate electrode of the seventh transistor37. A first terminal of the thirteenth transistor 43 is electricallyconnected to the power supply line 53, a second terminal of thethirteenth transistor 43 is electrically connected to the first outputterminal 26, and a gate electrode of the thirteenth transistor 43 iselectrically connected to the gate electrode of the seventh transistor37.

In FIG. 18C, a portion where the gate electrode of the third transistor33, the gate electrode of the tenth transistor 40, and the secondterminal of the ninth transistor 39 are connected is referred to as anode A. Moreover, a portion where the gate electrode of the secondtransistor 32, the gate electrode of the fourth transistor 34, thesecond terminal of the fifth transistor 35, the second terminal of thesixth transistor 36, the first terminal of the eighth transistor 38, andthe gate electrode of the eleventh transistor 41 is referred to as anode B (see FIG. 19A).

FIG. 19A illustrates signals that are input to or output from the firstinput terminal 21 to the fifth input terminal 25 and the first andoutput terminal 26 and the second output terminal 27 in the case wherethe pulse output circuit illustrated in FIG. 18C is applied to the firstpulse output circuit 10_1.

Specifically, the first clock signal CK1 is input to the first inputterminal 21; the second clock signal CK2 is input to the second inputterminal 22; the third clock signal CK3 is input to the third inputterminal 23; the start pulse is input to the fourth input terminal 24;the subsequent-stage signal OUT(3) is input to the fifth input terminal25; the first output signal OUT(1)(SR) is output from the first outputterminal 26; and the second output signal OUT(1) is output from thesecond output terminal 27.

Note that a thin film transistor is an element having at least threeterminals of a gate, a drain, and a source. The thin film transistor hasa semiconductor including a channel region formed in a regionoverlapping with the gate. Current that flows between the drain and thesource through the channel region can be controlled by controlling apotential of the gate. Here, since the source and the drain of the thinfilm transistor may change depending on the structure, the operatingcondition, and the like of the thin film transistor, it is difficult todefine which is a source or a drain. Therefore, a region functioning asthe source or the drain is not called the source or the drain in somecases. In that case, for example, such regions may be referred to as afirst terminal and a second terminal, respectively.

Note that in FIG. 18C and FIG. 19A, a capacitor for performing bootstrapoperation by bringing the node A into a floating state may beadditionally provided. Furthermore, a capacitor having one electrodeelectrically connected to the node B may be additionally provided inorder to hold a potential of the node B.

FIG. 19B illustrates a timing chart of a shift register including aplurality of pulse output circuits illustrated in FIG. 19A. Note thatwhen the shift register is included in a scan line driver circuit, aperiod 61 in FIG. 19B corresponds to a vertical retrace period and aperiod 62 corresponds to a gate selection period.

Note that by providing the ninth transistor 39 in which the second powersupply potential VCC is applied to the gate as illustrated in FIG. 19A,the following advantages before and after bootstrap operation areprovided.

In the case where a potential of the node A is raised by bootstrapoperation without the provision of the ninth transistor 39 in which thesecond power supply potential VCC is applied to the gate electrode, apotential of the source which is the second terminal of the firsttransistor 31 rises to a value higher than the first power supplypotential VDD. Then, the source of the first transistor 31 is switchedto the first terminal, that is, the terminal on the power supply line 51side. Consequently, in the first transistor 31, a high bias voltage isapplied and thus significant stress is applied between the gate and thesource and between the gate and the drain, which might causedeterioration of the transistor. In contrast, in the case of providingthe ninth transistor 39 in which the second power supply potential VCCis applied to the gate electrode, an increase in the potential of thesecond terminal of the first transistor 31 can be prevented while thepotential of the node A is raised by bootstrap operation. That is, theprovision of the ninth transistor 39 can lower the level of a negativebias voltage applied between the gate and the source of the firsttransistor 31. Thus, the circuit configuration in this embodiment canreduce a negative bias voltage applied between the gate and the sourceof the first transistor 31, so that deterioration of the firsttransistor 31 due to stress can be suppressed.

Note that the ninth transistor 39 may be provided anywhere as long asthe first terminal and the second terminal of the ninth transistor 39are connected between the second terminal of the first transistor 31 andthe gate of the third transistor 33. Note also that when the shiftregister including a plurality of pulse output circuits in thisembodiment serves as a signal line driver circuit having a larger numberof stages than a scan line driver circuit, the ninth transistor 39 canbe omitted, which results in reducing the number of transistors.

Note that an oxide semiconductor is used for semiconductor layers of thefirst transistor 31 to the thirteenth transistor 43; thus, the off-statecurrent of the thin film transistors can be reduced, the on-statecurrent and field effect mobility can be increased, and the degree ofdegradation of the transistors can be reduced. As a result, amalfunction in the circuit can be reduced. Moreover, the degree ofdeterioration of the transistor using an oxide semiconductor byapplication of a high potential to a gate electrode is smaller than thatof a transistor using amorphous silicon. Consequently, similar operationcan be obtained even when the first power supply potential VDD issupplied to the power supply line to which the second power supplypotential VCC is supplied, and the number of power supply lines placedbetween circuits can be reduced; thus, the size of the circuit can bereduced.

Note that a similar function is obtained even when the connectionrelation is changed so that a clock signal that is supplied to the gateelectrode of the seventh transistor 37 from the third input terminal 23and a clock signal that is supplied to the gate electrode of the eighthtransistor 38 from the second input terminal 22 are supplied from thesecond input terminal 22 and the third input terminal 23, respectively.In the shift register illustrated in FIG. 19A, a state of the seventhtransistor 37 and the eighth transistor 38 is changed so that both theseventh transistor 37 and the eighth transistor 38 are on, then theseventh transistor 37 is off and the eighth transistor 38 is on, andthen the seventh transistor 37 and the eighth transistor 38 are off;thus, the fall in potential of the node B due to fall in potentials ofthe second input terminal 22 and the third input terminal 23 is causedtwice by fall in potential of the gate electrode of the seventhtransistor 37 and fall in potential of the gate electrode of the eighthtransistor 38. In contrast, when a state of the seventh transistor 37and the eighth transistor 38 in the shift register illustrated in FIG.19A is changed as in the period in FIG. 19B so that both the seventhtransistor 37 and the eighth transistor 38 are on, then the seventhtransistor 37 is on and the eighth transistor 38 is off, and then theseventh transistor 37 and the eighth transistor 38 are off, the fall inpotential of the node B due to fall in potentials of the second inputterminal 22 and the third input terminal 23 occurs once, which is causedby fall in potential of the gate electrode of the eighth transistor 38.Consequently, it is preferable to use the clock signal supplied to thegate electrode of the seventh transistor 37 from the third inputterminal 23 and the clock signal supplied to the gate electrode of theeighth transistor 38 from the second input terminal 22 in order toreduce fluctuation in potential of the node B, because noise can bereduced.

In such a manner, an H-level signal is regularly supplied to the node Bin a period during which the potentials of the first output terminal 26and the second output terminal 27 are held at L level; thus, amalfunction of the pulse output circuit can be suppressed.

Embodiment 7

It is possible to manufacture a thin film transistor, and asemiconductor device having a display function (also referred to as adisplay device) using the thin film transistor in a pixel portion andalso in a driver circuit. Moreover, a part of the driver circuit or theentire driver circuit using a thin film transistor can be formed over asubstrate where a pixel portion is formed, whereby a system-on-panel canbe obtained.

The display device includes a display element. Examples of the displayelement include a liquid crystal element (also referred to as a liquidcrystal display element) and a light-emitting element (also referred toas a light-emitting display element). The light-emitting elementincludes in its category an element whose luminance is controlled bycurrent or voltage, and specifically includes an inorganicelectroluminescent (EL) element, an organic EL element, and the like.Furthermore, a display medium whose contrast is changed by an electriceffect, such as electronic ink, can be used.

In addition, the display device includes a panel in which the displayelement is sealed, and a module in which an IC or the like including acontroller is mounted on the panel. Furthermore, an element substrate,which corresponds to one embodiment before the display element iscompleted in a manufacturing process of the display device, is providedwith a means for supplying current to the display element in each of aplurality of pixels. Specifically, the element substrate may be in astate in which only a pixel electrode (also referred to as a pixelelectrode layer) of the display element is formed, a state afterformation of a conductive film to be a pixel electrode and beforeetching of the conductive film to form the pixel electrode, or any otherstates.

Note that a display device in this specification refers to an imagedisplay device, or a light source (including a lighting device).Further, the display device includes the following modules in itscategory: a module including a connector such as a flexible printedcircuit (FPC), a tape automated bonding (TAB) tape, or a tape carrierpackage (TCP); a module having a TAB tape or a TCP that is provided witha printed wiring board at the end thereof; and a module having anintegrated circuit (IC) that is directly mounted on a display element bya chip on glass (COG) method.

The appearance and a cross section of a liquid crystal display panel,which is one embodiment of a semiconductor device, will be describedwith reference to FIGS. 12A1, 12A2, and 12B. FIGS. 12A1 and 12A2 areplan views of panels in which thin film transistor 4010 and thin filmtransistor 4011 and a liquid crystal element 4013 are sealed between afirst substrate 4001 and a second substrate 4006 with a sealant 4005.FIG. 12B is a cross-sectional view taken along M-N in FIGS. 12A1 and12A2.

The sealant 4005 is provided so as to surround a pixel portion 4002 anda scan line driver circuit 4004 which are provided over the firstsubstrate 4001. The second substrate 4006 is provided over the pixelportion 4002 and the scan line driver circuit 4004. Consequently, thepixel portion 4002 and the scan line driver circuit 4004 are sealedtogether with a liquid crystal layer 4008, by the first substrate 4001,the sealant 4005, and the second substrate 4006. A signal line drivercircuit 4003 that is formed using a single crystal semiconductor film ora polycrystalline semiconductor film over a substrate separatelyprepared is mounted in a region that is different from the regionsurrounded by the sealant 4005 over the first substrate 4001.

Note that there is no particular limitation on the connection method ofthe driver circuit which is separately formed, and a COG method, a wirebonding method, a TAB method, or the like can be used. FIG. 12A1illustrates an example in which the signal line driver circuit 4003 ismounted by a COG method. FIG. 12A2 illustrates an example in whichsignal line driver circuit 4003 is mounted by a TAB method.

The pixel portion 4002 and the scan line driver circuit 4004 providedover the first substrate 4001 include a plurality of thin filmtransistors. FIG. 12B illustrates the thin film transistor 4010 includedin the pixel portion 4002 and the thin film transistor 4011 included inthe scan line driver circuit 4004, as an example. A protectiveinsulating layer 4020 and a protective insulating layer 4021 areprovided over the thin film transistor 4010 and the thin film transistor4011.

Any of the highly reliable thin film transistors including the oxidesemiconductor layers which are described in Embodiment 1 or Embodiment 2can be used as the thin film transistor 4010 and the thin filmtransistor 4011. The thin film transistor 141 or the thin filmtransistor 143 described in Embodiment 1 or Embodiment 2 can be used asthe thin film transistor 4011 for the driver circuit. The thin filmtransistor 142 or the thin film transistor 144 can be used as the thinfilm transistor 4010 for a pixel. In this embodiment, the thin filmtransistor 4010 and the thin film transistor 4011 are n-channel thinfilm transistors.

A back-gate electrode 4040 is provided over a part of the insulatinglayer 4021, which overlaps with a channel formation region of an oxidesemiconductor layer in the thin film transistor 4011 for the drivercircuit. By providing the back-gate electrode 4040 overlapping with thechannel formation region of the oxide semiconductor layer, the amount ofchange in threshold voltage of the thin film transistor 4011 before andafter the BT testing can be reduced. A potential of the back-gateelectrode 4040 may be the same as or different from that of a gateelectrode layer of the thin film transistor 4011. The back-gateelectrode 4040 can also function as a second gate electrode layer.Alternatively, the potential of the back-gate electrode 4040 may be GND,0 V, or the back-gate electrode 4040 may be in a floating state.

A pixel electrode layer 4030 included in the liquid crystal element 4013is electrically connected to the thin film transistor 4010. A counterelectrode layer 4031 of the liquid crystal element 4013 is formed on thesecond substrate 4006. A portion where the pixel electrode layer 4030,the counter electrode layer 4031, and the liquid crystal layer 4008overlap with one another corresponds to the liquid crystal element 4013.Note that the pixel electrode layer 4030 and the counter electrode layer4031 are provided with an insulating layer 4032 and an insulating layer4033 functioning as alignment films, respectively, and the liquidcrystal layer 4008 is interposed between the pixel electrode layer 4030and the counter electrode layer 4031 with the insulating layer 4032 andthe insulating layer 4033 therebetween.

Note that a light-transmitting substrate can be used as the firstsubstrate 4001 and the second substrate 4006; a glass substrate, aceramics substrate, or a plastic substrate can be used. The plasticsubstrate can be a fiberglass-reinforced plastics (FRP) plate, apolyvinyl fluoride (PVF) film, a polyester film, or an acrylic resinfilm.

A columnar spacer 4035 is obtained by selective etching of an insulatingfilm and provided in order to control the distance (a cell gap) betweenthe pixel electrode layer 4030 and the counter electrode layer 4031.Alternatively, a spherical spacer may be used. The counter electrodelayer 4031 is electrically connected to a common potential line formedover the substrate where the thin film transistor 4010 is formed. Thecounter electrode layer 4031 and the common potential line can beelectrically connected to each other through conductive particlesarranged between a pair of substrates using the common connectionportion. Note that the conductive particles are included in the sealant4005.

Alternatively, liquid crystal exhibiting a blue phase for which analignment film is unnecessary may be used. The blue phase is one ofliquid crystal phases, which occurs just before a cholesteric phasechanges into an isotropic phase while temperature of cholesteric liquidcrystal is increased; thus, the blue phase only occurs within a narrowrange of temperature. In order to improve the temperature range, aliquid crystal composition containing a chiral agent at 5 wt % or higheris used for the liquid crystal layer 4008. The liquid crystalcomposition including liquid crystal exhibiting a blue phase and achiral agent has a short response time of 1 msec or less and isoptically isotropic; therefore, alignment treatment is not necessary andviewing angle dependence is small.

Note that this embodiment can also be applied to a transflective liquidcrystal display device in addition to a transmissive liquid crystaldisplay device.

In the example of the liquid crystal display device, a polarizing plateis provided on the outer surface of the substrate (on the viewer side)and a coloring layer (a color filter) and an electrode layer used for adisplay element are sequentially provided on the inner surface of thesubstrate; alternatively, the polarizing plate may be provided on theinner surface of the substrate. The layered structure of the polarizingplate and the coloring layer is not limited to that in this embodiment,but may be set as appropriate depending on materials of the polarizingplate and the coloring layer or conditions of the manufacturing process.Further, a light-blocking film serving as a black matrix may be providedexcept in the display portion.

In the thin film transistor 4011, the insulating layer 4042 is formed asa channel protective layer. The insulating layer 4042 may be formedusing a material and a method which are similar to those of the channelprotective layer 116 and the channel protective layer 216 described inEmbodiment 1. Moreover, the insulating layer 4021 functioning as aplanarization insulating film covers the thin film transistors in orderto reduce surface unevenness of the thin film transistors. Here, as theinsulating layer 4041 and the insulating layer 4042, a silicon oxidefilm is formed by a sputtering method described in Embodiment 1 as anexample.

The protective insulating layer 4020 is formed over the insulating layer4041 and the insulating layer 4042. The protective insulating layer 4020can be formed using a material and a method which are similar to thoseof the protective insulating film 107 described in Embodiment 1. Here, asilicon nitride film is formed by a PCVD method as the insulating layer4020.

The insulating layer 4021 is formed as the planarization insulatingfilm. The insulating layer 4021 can be formed using a material and amethod which are similar to those of the protective insulating film 108described in Embodiment 1, and a heat-resistant organic material such aspolyimide, acrylic, benzocyclobutene, polyamide, or epoxy can be used.Other than such organic materials, it is also possible to use alow-dielectric constant material (a low-k material), a siloxane-basedresin, PSG (phosphosilicate glass), BPSG (borophosphosilicate glass), orthe like. Note that the insulating layer 4021 may be formed by stackinga plurality of insulating films formed from these materials.

Note that the siloxane-based resin corresponds to a resin including aSi—O—Si bond formed using a siloxane-based material as a startingmaterial. The siloxane-based resin may include an organic group (e.g.,an alkyl group or an aryl group) or a fluoro group as a substituent.Moreover, the organic group may include a fluoro group.

There is no particular limitation on the method of forming theinsulating layer 4021, and the following method or means can be useddepending on the material: a sputtering method, an SOG method, a spincoating method, a dipping method, a spray coating method, or a dropletdischarge method (e.g., an ink-jet method, screen printing, or offsetprinting); a doctor knife, a roll coater, a curtain coater, a knifecoater, or the like. The baking step of the insulating layer 4021 alsoserves as annealing of the semiconductor layer, whereby a semiconductordevice can be efficiently manufactured.

The pixel electrode layer 4030 and the counter electrode layer 4031 canbe formed from a light-transmitting conductive material such as indiumoxide containing tungsten oxide, indium zinc oxide containing tungstenoxide, indium oxide containing titanium oxide, indium tin oxidecontaining titanium oxide, indium tin oxide (ITO), indium zinc oxide, orindium tin oxide to which silicon oxide is added.

Alternatively, a conductive composition containing a conductive highmolecule (also referred to as a conductive polymer) can be used for thepixel electrode layer 4030 and the counter electrode layer 4031. Thepixel electrode formed using the conductive composition preferably has asheet resistance of less than or equal to 10000 ohms per square and alight transmittance of greater than or equal to 70% at a wavelength of550 nm. Further, the resistivity of the conductive high moleculecontained in the conductive composition is preferably less than or equalto 0.1 Ω·cm.

As the conductive high molecule, a so-called π-electron conjugatedconductive polymer can be used. Examples are polyaniline and aderivative thereof, polypyrrole and a derivative thereof, polythiopheneand a derivative thereof, a copolymer of two or more kinds of thesematerials, and the like.

Further, a variety of signals and potentials are supplied to the signalline driver circuit 4003 which is separately formed, the scan linedriver circuit 4004, or the pixel portion 4002 from an FPC 4018.

A connection terminal electrode 4015 is formed using the same conductivefilm as the pixel electrode layer 4030 included in the liquid crystalelement 4013. A terminal electrode 4016 is formed using the sameconductive film as source and drain electrode layers of the thin filmtransistor 4011.

The connection terminal electrode 4015 is electrically connected to aterminal included in the FPC 4018 through an anisotropic conductive film4019.

Note that FIGS. 12A1, 12A2, and 12B illustrate the example in which thesignal line driver circuit 4003 is formed separately and mounted on thefirst substrate 4001; however, this embodiment is not limited to thisstructure. The scan line driver circuit may be separately formed andthen mounted, or only a part of the signal line driver circuit or a partof the scan line driver circuit may be separately formed and thenmounted.

FIG. 21 illustrates an example of a liquid crystal display module whichis formed as a semiconductor device by using a TFT substrate 2600manufactured according to the manufacturing method disclosed in thisspecification.

FIG. 21 shows an example of the liquid crystal display module, in whichthe TFT substrate 2600 and a counter substrate 2601 are fixed to eachother with a sealant 2602, and a pixel portion 2603 including a TFT andthe like, a display element 2604 including a liquid crystal layer, and acoloring layer 2605 are provided between the substrates to form adisplay region. The coloring layer 2605 is necessary to perform colordisplay. In the RGB system, coloring layers corresponding to colors ofred, green, and blue are provided for pixels. A polarizing plate 2606, apolarizing plate 2607, and a diffusion plate 2613 are provided outsidethe TFT substrate 2600 and the counter substrate 2601. A light sourceincludes a cold cathode tube 2610 and a reflective plate 2611. A circuitboard 2612 is connected to a wiring circuit portion 2608 of the TFTsubstrate 2600 by a flexible wiring board 2609 and includes an externalcircuit such as a control circuit or a power source circuit. Thepolarizing plate and the liquid crystal layer may be stacked with aretardation plate therebetween.

For the liquid crystal display module, a twisted nematic (TN) mode, anin-plane-switching (IPS) mode, a fringe field switching (FFS) mode, amulti-domain vertical alignment (MVA) mode, a patterned verticalalignment (PVA) mode, an axially symmetric aligned micro-cell (ASM)mode, an optical compensated birefringence (OCB) mode, a ferroelectricliquid crystal (FLC) mode, an antiferroelectric liquid crystal (AFLC)mode, or the like can be used.

Through the above-described steps, a liquid crystal display panel as ahighly reliable semiconductor device can be manufactured.

This embodiment can be implemented in appropriate combination with anyof the structures described in the other embodiments.

Embodiment 8

In this embodiment, an example of an electronic paper will be describedas one embodiment of a semiconductor device.

The semiconductor device can be used for electronic paper in whichelectronic ink is driven by an element electrically connected to aswitching element. The electronic paper is also referred to as anelectrophoretic display device (an electrophoretic display) and hasadvantages in that it has the same level of readability as regularpaper, it has lower power consumption than other display devices, and itcan be made thin and lightweight.

Electrophoretic displays can have various modes. Electrophoreticdisplays contain a plurality of microcapsules dispersed in a solvent ora solute, each of which contains first particles that are positivelycharged and second particles that are negatively charged. By applying anelectric field to the microcapsules, the particles in the microcapsulesmove in opposite directions to each other and only the color of theparticles gathering on one side is displayed. Note that the firstparticles and the second particles contain a pigment and do not movewithout an electric field. Moreover, the first particles and the secondparticles have different colors (which may be colorless).

In this manner, an electrophoretic display utilizes a so-calleddielectrophoretic effect by which a substance having a high dielectricconstant moves to a high-electric field region. An electrophoreticdisplay device does not need to use a polarizing plate, which isrequired for a liquid crystal display device.

A solution in which the above-described microcapsules are dispersed in asolvent is referred to as electronic ink. This electronic ink can beprinted on a surface of glass, plastic, cloth, paper, or the like.Furthermore, color display can be achieved with a color filter orparticles including a pigment.

When a plurality of the above-described microcapsules are arranged asappropriate over an active matrix substrate so as to be sandwichedbetween two electrodes, an active matrix display device can becompleted, and display can be performed by application of an electricfield to the microcapsules. For example, the active matrix substratewith the use of the thin film transistor in Embodiment 1 or 2 can beused.

Note that the first particles and the second particles in themicrocapsules may be formed from one of a conductive material, aninsulating material, a semiconductor material, a magnetic material, aliquid crystal material, a ferroelectric material, an electroluminescentmaterial, an electrochromic material, and a magnetophoretic material ora composite material of any of these materials.

FIG. 20 illustrates an active matrix electronic paper as an example of asemiconductor device. A thin film transistor 581 used for thesemiconductor device can be formed in a manner similar to that of thethin film transistor described in Embodiment 1 and is a highly reliablethin film transistor including an oxide semiconductor layer. Moreover,any of the thin film transistors described in Embodiments 2 to 4 canalso be used as the thin film transistor 581 in this embodiment.

The electronic paper in FIG. 20 is an example of a display device usinga twisting ball display system. The twisting ball display system refersto a method in which spherical particles each colored in black and whiteare arranged between a first electrode layer and a second electrodelayer which are electrode layers used for a display element, and apotential difference is generated between the first electrode layer andthe second electrode layer to control orientation of the sphericalparticles, so that display is performed.

The thin film transistor 581 formed over a substrate 580 is abottom-gate thin film transistor and covered with an insulating film583. A source electrode layer or a drain electrode layer of the thinfilm transistor 581 is in contact with a first electrode layer 587 at anopening formed in the insulating layer 583 and an insulating layer 585,whereby the thin film transistor 581 is electrically connected to thefirst electrode layer 587. Spherical particles 589 are provided betweenthe first electrode layer 587 and a second electrode layer 588 formed ona second substrate 596. Each of the spherical particles 589 includes ablack region 590 a, a white region 590 b, and a cavity 594 filled withliquid around the black region 590 a and the white region 590 b. A spacearound the spherical particles 589 is filled with a filler 595 such as aresin. The first electrode layer 587 corresponds to a pixel electrode,and the second electrode layer 588 corresponds to a common electrode.The second electrode layer 588 is electrically connected to a commonpotential line provided over the substrate where the thin filmtransistor 581 is formed. With the use of a common connection portion,the second electrode layer 588 and the common potential line can beelectrically connected to each other through conductive particlesprovided between a pair of substrates.

Alternatively, it is possible to use an electrophoretic element insteadof the twisting ball. A microcapsule having a diameter of approximately10 μm to 200 μm, in which transparent liquid, positively charged whitemicroparticles, and negatively charged black microparticles areencapsulated, is used. In the microcapsule provided between the firstelectrode layer and the second electrode layer, when an electric fieldis applied by the first electrode layer and the second electrode layer,the white microparticles and the black microparticles move in oppositedirections, so that white or black can be displayed. A display elementusing this principle is an electrophoretic display element, and a deviceincluding the electrophoretic display element is called electronic paperin general. The electrophoretic display element has higher reflectancethan a liquid crystal display element; thus, an auxiliary light isunnecessary, power consumption is low, and a display portion can berecognized in a dim place. In addition, even when power is not suppliedto the display portion, an image which has been displayed once can bemaintained. Consequently, a displayed image can be stored even when asemiconductor device having a display function (which may be referred tosimply as a display device or a semiconductor device provided with adisplay device) is kept away from an electric wave source.

Through the above-described steps, a highly reliable electronic papercan be manufactured as a semiconductor device.

This embodiment can be implemented in appropriate combination with anyof the structures described in the other embodiments.

Embodiment 9

An example of a light-emitting display device will be described as asemiconductor device. As a display element included in a display device,a light-emitting element utilizing electroluminescence is describedhere. Light-emitting elements utilizing electroluminescence areclassified according to whether a light-emitting material is an organiccompound or an inorganic compound. In general, the former is referred toas an organic EL element, and the latter is referred to as an inorganicEL element.

In an organic EL element, by application of voltage to thelight-emitting element, electrons and holes are separately injected froma pair of electrodes into a layer containing a light-emitting organiccompound, and current flows. The carriers (electrons and holes) arerecombined, and thus, the light-emitting organic compound is excited.The light-emitting organic compound returns to a ground state from theexcited state, thereby emitting light. Owing to such a mechanism, thislight-emitting element is referred to as a current-excitationlight-emitting element.

Inorganic EL elements are classified according to their elementstructures into a dispersion-type inorganic EL element and a thin-filminorganic EL element. A dispersion-type inorganic EL element includes alight-emitting layer where particles of a light-emitting material aredispersed in a binder, and its light emission mechanism isdonor-acceptor recombination type light emission that utilizes a donorlevel and an acceptor level. A thin-film inorganic EL element has astructure where a light-emitting layer is sandwiched between dielectriclayers, which are further sandwiched between electrodes, and its lightemission mechanism is localized type light emission that utilizesinner-shell electron transition of metal ions. Note that here, anorganic EL element is described as a light-emitting element.

FIG. 14 illustrates an example of a pixel structure to which digitaltime grayscale driving can be applied, as an example of a semiconductordevice.

A structure and operation of a pixel to which digital time grayscaledriving can be applied are described. Here, one pixel includes twon-channel transistors each of which includes an oxide semiconductorlayer as a channel formation region.

A pixel 6400 includes a switching transistor 6401, a driver transistorfor a light-emitting element 6402, a light-emitting element 6404, and acapacitor 6403. A gate of the switching transistor 6401 is connected toa scan line 6406. A first electrode (one of a source electrode and adrain electrode) of the switching transistor 6401 is connected to asignal line 6405. A second electrode (the other of the source electrodeand the drain electrode) of the switching transistor 6401 is connectedto a gate of the driver transistor for a light-emitting element 6402.The gate of the driver transistor for a light-emitting element 6402 isconnected to a power supply line 6407 through the capacitor 6403. Afirst electrode of the driver transistor for a light-emitting element6402 is connected to the power supply line 6407. A second electrode ofthe driver transistor for a light-emitting element 6402 is connected toa first electrode (a pixel electrode) of the light-emitting element6404. A second electrode of the light-emitting element 6404 correspondsto a common electrode 6408. The common electrode 6408 is electricallyconnected to a common potential line provided over the same substrate.

The second electrode (the common electrode 6408) of the light-emittingelement 6404 is set to a low power supply potential. Note that the lowpower supply potential is lower than a high power supply potential thatis set to the power supply line 6407. For example, GND or 0 V may be setas the low power supply potential. A potential difference between thehigh power supply potential and the low power supply potential isapplied to the light-emitting element 6404 so that current flows throughthe light-emitting element 6404, whereby the light-emitting element 6404emits light. In order to make the light-emitting element 6404 emitlight, each potential is set so that the potential difference betweenthe high power supply potential and the low power supply potential ishigher than or equal to the forward threshold voltage of thelight-emitting element 6404. Note that the common electrode 6408 may beset to a high power supply potential, and the power supply line 6407 maybe set to a low power supply potential. In that case, the structure ofthe light-emitting element 6404 may be modified as appropriate becausethe current in the light-emitting element 6404 flows reversely.

Note that gate capacitance of the driver transistor for a light-emittingelement 6402 may be used as a substitute for the capacitor 6403, so thatthe capacitor 6403 can be omitted. The gate capacitance of the drivertransistor for a light-emitting element 6402 may be formed between thechannel region and the gate electrode.

In the case of employing a voltage-input voltage-driving method, a videosignal is input to the gate of the driver transistor for alight-emitting element 6402 so that the driver transistor for alight-emitting element 6402 is in either of two states of beingsufficiently turned on or turned off. That is, the driver transistor fora light-emitting element 6402 is operated in a linear region. Since thedriver transistor for a light-emitting element 6402 is operated in thelinear region, a voltage higher than the voltage of the power supplyline 6407 is applied to the gate of the driver transistor for alight-emitting element 6402. Note that a voltage higher than or equal tothe sum of the power supply line voltage and Vth of the drivertransistor for a light-emitting element 6402 is applied to the signalline 6405.

In the case of employing an analog grayscale method instead of thedigital time grayscale method, the same pixel structure as that in FIG.14 can be employed by changing signal input.

In the case of performing analog grayscale driving, a voltage higherthan or equal to the sum of the forward voltage of the light-emittingelement 6404 and Vth of the driver transistor for a light-emittingelement 6402 is applied to the gate of the driver transistor for alight-emitting element 6402. The forward voltage of the light-emittingelement 6404 indicates a voltage at which a desired luminance isobtained, and includes at least a forward threshold voltage. The videosignal by which the driver transistor for a light-emitting element 6402is operated in a saturation region is input, so that current can besupplied to the light-emitting element 6404. In order to operate thedriver transistor for a light-emitting element 6402 in the saturationregion, the potential of the power supply line 6407 is set higher thanthe gate potential of the driver transistor for a light-emitting element6402. When an analog video signal is used, a current corresponding tothe video signal can be supplied to the light-emitting element 6404, sothat analog grayscale driving can be performed.

Note that the pixel structure is not limited to that illustrated in FIG.14. For example, a switch, a resistor, a capacitor, a transistor, alogic circuit, or the like may be added to the pixel illustrated in FIG.14.

Next, a structure of a light-emitting element will be described withreference to FIGS. 15A to 15C. Here described is a cross-sectionalstructure of an example in which an n-channel driver TFT for alight-emitting element is used, the upper electrode of two electrodesincluded in the light-emitting element is an anode, and the lowerelectrode thereof is a cathode. TFTs 7001, 7011, and 7021 serving asdriver TFTs for a light-emitting element used in semiconductor devicesillustrated in FIGS. 15A, 15B, and 15C can be formed in a manner similarto that of the thin film transistor provided for a pixel described inEmbodiment 1 and are highly reliable thin film transistors eachincluding an oxide semiconductor layer. Alternatively, any of the thinfilm transistors provided for a pixel described in Embodiments 2 to 4can be employed as the TFTs 7001, 7011, and 7021.

In order to extract light emitted from the light-emitting element, atleast one of an anode and a cathode needs to transmit light. A thin filmtransistor and a light-emitting element are formed over a substrate. Thelight-emitting element can have a top emission structure in which lightis extracted through the surface opposite to the substrate; a bottomemission structure in which light is extracted through the surface onthe substrate side; or a dual emission structure in which light isextracted through the surface opposite to the substrate and the surfaceon the substrate side. The pixel structure can be applied to alight-emitting element having any of these emission structures.

A light-emitting element having the top emission structure is describedwith reference to FIG. 15A.

FIG. 15A is a cross-sectional view of a pixel in the case where the TFT7001 serving as the driver TFT for a light-emitting element is ann-channel TFT and light emitted from a light-emitting element 7002passes through an anode 7005. In FIG. 15A, a cathode 7003 of thelight-emitting element 7002 is electrically connected to the TFT 7001serving as the driver TFT for a light-emitting element, and alight-emitting layer 7004 and the anode 7005 are stacked in this orderover the cathode 7003. The cathode 7003 can be formed using a variety ofconductive materials as long as they have a low work function andreflect light. For example, Ca, Al, MgAg, AlLi, or the like ispreferably used. The light-emitting layer 7004 may be formed using asingle layer or a plurality of layers stacked. When the light-emittinglayer 7004 is formed using a plurality of layers, the light-emittinglayer 7004 is formed by stacking an electron injection layer, anelectron transport layer, a light-emitting layer, a hole transportlayer, and a hole injection layer in this order over the cathode 7003.Note that it is not necessary to form all of these layers. The anode7005 is formed using a light-transmitting conductive film, for example,a film of indium oxide containing tungsten oxide, indium zinc oxidecontaining tungsten oxide, indium oxide containing titanium oxide,indium tin oxide containing titanium oxide, indium tin oxide (ITO),indium zinc oxide, or indium tin oxide to which silicon oxide is added.

Moreover, a bank 7009 is provided between the cathode 7003 and a cathode7008 in an adjacent pixel so as to cover edges of the cathodes 7003 and7008. The bank 7009 can be formed using an organic resin film ofpolyimide, acrylic, polyamide, epoxy, or the like; an inorganicinsulating film; or organic polysiloxane. It is particularly preferablethat the bank 7009 be formed using a photosensitive resin material sothat its side surface is an inclined surface with continuous curvature.When a photosensitive resin material is used for the bank 7009, a stepof forming a resist mask can be omitted.

The light-emitting element 7002 corresponds to a region where thelight-emitting layer 7004 is sandwiched between the cathode 7003 and theanode 7005. In the pixel illustrated in FIG. 15A, light is emitted fromthe light-emitting element 7002 to the anode 7005 side as indicated byarrows.

Next, a light-emitting element having the bottom emission structure isdescribed with reference to FIG. 15B. FIG. 15B is a cross-sectional viewof a pixel in the case where the driver TFT for a light-emitting element7011 is an n-channel TFT and light is emitted from a light-emittingelement 7012 to a cathode 7013 side. In FIG. 15B, the cathode 7013 ofthe light-emitting element 7012 is formed over a light-transmittingconductive film 7017 that is electrically connected to the driver TFTfor a light-emitting element 7011, and a light-emitting layer 7014 andan anode 7015 are stacked in this order over the cathode 7013. Note thata light-blocking film 7016 for reflecting or blocking light may beformed so as to cover the anode 7015 when the anode 7015 haslight-transmitting properties. The cathode 7013 can be formed using avariety of conductive materials as in the case of FIG. 15A as long asthey have a low work function. Note that the cathode 7013 is formed to athickness that can transmit light (preferably approximately 5 nm to 30nm). For example, a 20-nm-thick aluminum film can be used as the cathode7013. As in the case of FIG. 15A, the light-emitting layer 7014 may beformed using a single layer or a plurality of layers stacked. The anode7015 is not necessary to transmit light, but can be formed using alight-transmitting conductive material as in the case of FIG. 15A. Forthe light-blocking film 7016, a metal or the like that reflects lightcan be used, for example; however, the light-blocking film 7016 is notlimited to a metal film. For example, a resin or the like to which ablack pigment is added can be used.

Moreover, a bank 7019 is provided between the conductive film 7017 and aconductive film 7018 in an adjacent pixel so as to cover edges of theconductive films 7017 and 7018. The bank 7019 can be formed using anorganic resin film of polyimide, acrylic, polyamide, epoxy, or the like;an inorganic insulating film; or organic polysiloxane. It isparticularly preferable that the bank 7019 be formed using aphotosensitive resin material so that its side surface is an inclinedsurface with continuous curvature. When a photosensitive resin materialis used for the bank 7019, a step of forming a resist mask can beomitted.

The light-emitting element 7012 corresponds to a region where thelight-emitting layer 7014 is sandwiched between the cathode 7013 and theanode 7015. In the pixel illustrated in FIG. 15B, light is emitted fromthe light-emitting element 7012 to the cathode 7013 side as indicated byarrows.

Next, a light-emitting element having the dual emission structure isdescribed with reference to FIG. 15C. In FIG. 15C, a cathode 7023 of alight-emitting element 7022 is formed over a light-transmittingconductive film 7027 that is electrically connected to the driver TFTfor a light-emitting element 7021, and a light-emitting layer 7024 andan anode 7025 are sequentially stacked over the cathode 7023. As in thecase of FIG. 15A, the cathode 7023 can be formed using any of a varietyof materials as long as it is a conductive material having a low workfunction. Note that the cathode 7023 is formed to a thickness that cantransmit light. For example, a 20-nm-thick film of Al can be used as thecathode 7023. As in the case of FIG. 15A, the light-emitting layer 7024may be formed using a single layer or a plurality of layers stacked. Theanode 7025 can be formed using a light-transmitting conductive materialas in the case of FIG. 15A.

Moreover, a bank 7029 is provided between the conductive film 7027 and aconductive film 7028 in an adjacent pixel so as to cover edges of theconductive films 7027 and 7028. The bank 7029 can be formed using anorganic resin film of polyimide, acrylic, polyamide, epoxy, or the like;an inorganic insulating film; or organic polysiloxane. It isparticularly preferable that the bank 7029 be formed using aphotosensitive resin material so that its side surface is an inclinedsurface with continuous curvature. When a photosensitive resin materialis used for the bank 7029, a step of forming a resist mask can beomitted.

The light-emitting element 7022 corresponds to a portion where thecathode 7023, the light-emitting layer 7024, and the anode 7025 overlapwith one another. In the pixel illustrated in FIG. 15C, light is emittedfrom the light-emitting element 7022 to both the anode 7025 side and thecathode 7023 side as indicated by arrows.

Note that although the organic EL elements are described here as thelight-emitting elements, an inorganic EL element can also be provided asa light-emitting element.

Note that the example is described in which the thin film transistor(the driver TFT for a light-emitting element) which controls the drivingof a light-emitting element is electrically connected to thelight-emitting element; alternatively, a structure may be employed inwhich a TFT for current control is connected between the driver TFT fora light-emitting element and the light-emitting element.

Note that the structure of the semiconductor device is not limited tothose illustrated in FIGS. 15A to 15C and can be modified in variousways based on techniques disclosed in this specification.

Next, the appearance and a cross section of a light-emitting displaypanel (also referred to as a light-emitting panel) which is oneembodiment of a semiconductor device will be described with reference toFIGS. 13A and 13B. FIG. 13A is a plan view of a panel in which a thinfilm transistor and a light-emitting element that are formed over afirst substrate are sealed between the first substrate and a secondsubstrate with a sealant. FIG. 13B is a cross-sectional view along H-Iin FIG. 13A.

A sealant 4505 is provided so as to surround a pixel portion 4502,signal line driver circuits 4503 a and 4503 b, and scan line drivercircuits 4504 a and 4504 b which are provided over a first substrate4501. Moreover, a second substrate 4506 is provided over the pixelportion 4502, the signal line driver circuits 4503 a and 4503 b, and thescan line driver circuits 4504 a and 4504 b. Consequently, the pixelportion 4502, the signal line driver circuits 4503 a and 4503 b, and thescan line driver circuits 4504 a and 4504 b are sealed together with afiller 4507 by the first substrate 4501, the sealant 4505, and thesecond substrate 4506. In this manner, a panel is preferably packaged(sealed) with a protective film (such as a laminate film or anultraviolet curable resin film) or a cover material with highair-tightness and little degasification so that the panel is not exposedto the outside air.

The pixel portion 4502, the signal line driver circuits 4503 a and 4503b, and the scan line driver circuits 4504 a and 4504 b, which are formedover the first substrate 4501, each include a plurality of thin filmtransistors. A thin film transistor 4510 included in the pixel portion4502 and a thin film transistor 4509 included in the signal line drivercircuit 4503 a are illustrated as an example in FIG. 13B.

Any of the highly reliable thin film transistors including the oxidesemiconductor layers described in any of Embodiment 1 or Embodiment 2can be used as the thin film transistors 4509 and 4510. The thin filmtransistor 141 or the thin film transistor 143 described in Embodiment 1or Embodiment 2 can be used as the thin film transistor 4509 providedfor the driver circuit. The thin film transistor 142 or the thin filmtransistor 144 can be used as the thin film transistor 4510 provided fora pixel. In this embodiment, the thin film transistors 4509 and 4510 aren-channel thin film transistors.

A back-gate electrode 4540 is provided over a part of an insulatinglayer 4544, which overlaps with a channel formation region of an oxidesemiconductor layer in the thin film transistor 4509 for the drivercircuit. By providing the back-gate electrode 4540 overlapping with thechannel formation region of the oxide semiconductor layer, the amount ofchange in threshold voltage of the thin film transistor 4509 before andafter the BT testing can be reduced. A potential of the back-gateelectrode 4540 may be the same as or different from that of a gateelectrode layer in the thin film transistor 4509. The back-gateelectrode 4540 can also function as a second gate electrode layer.Alternatively, the potential of the back-gate electrode 4540 may be GND,0 V, or the back-gate electrode 4540 may be in a floating state.

In the thin film transistor 4509, the insulating layer 4541 is formed asa channel protective layer. In the thin film transistor 4510, aninsulating layer 4542 is formed as a channel protective layer. Theinsulating layers 4541 and 4542 can be formed using a material by amethod which are similar to those of the channel protective layers 116and 216 described in Embodiment 1. Moreover, the insulating layer 4544functioning as a planarization insulating film covers the thin filmtransistor in order to reduce surface unevenness of the thin filmtransistors. Here, as the insulating layers 4541 and 4542, a siliconoxide film is formed by a sputtering method described in Embodiment 1 asan example.

Furthermore, a protective insulating layer 4543 is formed over the thinfilm transistors 4509 and 4510. The protective insulating layer 4543 canbe formed using a material by a method which are similar to those of theprotective insulating film 107 described in Embodiment 1. Here, asilicon nitride film is formed by a PCVD method as the protectiveinsulating layer 4543.

The insulating layer 4544 is formed as the planarization insulatingfilm. The insulating layer 4544 can be formed using a material by amethod which are similar to those of the second protective insulatingfilm 108 described in Embodiment 1. Here, acrylic is used for theinsulating layer 4544.

Reference numeral 4511 denotes a light-emitting element. A firstelectrode layer 4517 which is a pixel electrode included in thelight-emitting element 4511 is electrically connected to a sourceelectrode layer or a drain electrode layer of the thin film transistor4510. Note that the structure of the light-emitting element 4511 is notlimited to a layered structure of the first electrode layer 4517, anelectroluminescent layer 4512, and a second electrode layer 4513. Thestructure of the light-emitting element 4511 can be changed asappropriate depending on the direction in which light is extracted fromthe light-emitting element 4511, or the like.

A bank 4520 is formed using an organic resin film, an inorganicinsulating film, or organic polysiloxane. It is particularly preferablethat the bank 4520 be formed using a photosensitive material and anopening be formed over the first electrode layer 4517 so that a sidewallof the opening is formed as an inclined surface with continuouscurvature.

The electroluminescent layer 4512 may be formed with a single layer or aplurality of layers stacked.

A protective film may be formed over the second electrode layer 4513 andthe bank 4520 in order to prevent the entry of oxygen, hydrogen,moisture, carbon dioxide, or the like into the light-emitting element4511. As the protective film, a silicon nitride film, a silicon nitrideoxide film, a DLC film, or the like can be formed.

In addition, a variety of signals and potentials are supplied to thesignal line driver circuits 4503 a and 4503 b, the scan line drivercircuits 4504 a and 4504 b, or the pixel portion 4502 from FPCs 4518 aand 4518 b.

A connection terminal electrode 4515 is formed from the same conductivefilm as the first electrode layer 4517 included in the light-emittingelement 4511, and a terminal electrode 4516 is formed from the sameconductive film as the source and drain electrode layers included in thethin film transistor 4509.

The connection terminal electrode 4515 is electrically connected to aterminal included in the FPC 4518 a through an anisotropic conductivefilm 4519.

The second substrate positioned in the direction in which light isextracted from the light-emitting element 4511 needs to havelight-transmitting properties. In that case, a light-transmittingmaterial such as a glass plate, a plastic plate, a polyester film, or anacrylic film is used for the second substrate.

As the filler 4507, an ultraviolet curable resin or a thermosettingresin can be used in addition to an inert gas such as nitrogen or argon.For example, PVC (polyvinyl chloride), acrylic, polyimide, an epoxyresin, a silicone resin, PVB (polyvinyl butyral), or EVA (ethylene vinylacetate) can be used. For example, nitrogen is used for the filler.

When needed, an optical film such as a polarizing plate, a circularlypolarizing plate (including an elliptically polarizing plate), aretardation plate (a quarter-wave plate or a half-wave plate), or acolor filter may be provided as appropriate on a light-emitting surfaceof the light-emitting element. Further, a polarizing plate or acircularly polarizing plate may be provided with an anti-reflectionfilm. For example, anti-glare treatment can be performed by whichreflected light can be diffused by projections and depressions on thesurface so as to reduce glare.

Driver circuits formed using a single crystal semiconductor film or apolycrystalline semiconductor film over a substrate separately preparedmay be mounted as the signal line driver circuits 4503 a and 4503 b andthe scan line driver circuits 4504 a and 4504 b. Alternatively, only thesignal line driver circuits or a part thereof, or only the scan linedriver circuits or a part thereof may be separately formed and mounted.This embodiment is not limited to the structure illustrated in FIGS. 13Aand 13B.

Through the above-described steps, a light-emitting display device(display panel) as a highly reliable semiconductor device can bemanufactured.

This embodiment can be implemented in appropriate combination with anyof the structures described in the other embodiments.

Embodiment 10

A semiconductor device disclosed in this specification can be applied toelectronic paper. Electronic paper can be used for electronic devices inall fields as long as they display data. For example, electronic papercan be applied to an e-book reader (an electronic book), a poster, anadvertisement in a vehicle such as a train, or displays of a variety ofcards such as a credit card. FIG. 22 illustrates an example of theelectronic devices.

FIG. 22 illustrates an example of an e-book reader 2700. For example,the e-book reader 2700 includes two housings of a housing 2701 and ahousing 2703. The housing 2701 and the housing 2703 are combined with ahinge 2711 so that the e-book reader 2700 can be opened and closed withthe hinge 2711 as an axis. Such a structure enables the e-book reader2700 to be operated like a paper book.

A display portion 2705 and a display portion 2707 are incorporated inthe housing 2701 and the housing 2703, respectively. The display portion2705 and the display portion 2707 may display one image or differentimages. In the case where the display portion 2705 and the displayportion 2707 display different images, for example, a display portion onthe right side (the display portion 2705 in FIG. 22) can display textand a display portion on the left side (the display portion 2707 in FIG.22) can display graphics.

FIG. 22 illustrates an example in which the housing 2701 is providedwith an operation portion and the like. For example, the housing 2701 isprovided with a power switch 2721, operation keys 2723, a speaker 2725,and the like. Pages can be turned with the operation keys 2723. Notethat a keyboard, a pointing device, and the like may be provided on thesame surface as the display portion of the housing. Moreover, anexternal connection terminal (an earphone terminal, a USB terminal, aterminal connectable to a variety of cables such as an AC adapter and aUSB cable, or the like), a recording medium insertion portion, and thelike may be provided on the back surface or the side surface of thehousing. Moreover, the e-book reader 2700 may have a function of anelectronic dictionary.

The e-book reader 2700 may be configured to wirelessly transmit andreceive data. Through wireless communication, desired book data or thelike can be purchased and downloaded from an electronic book server.

Embodiment 11

A semiconductor device disclosed in this specification can be applied toa variety of electronic devices (including game machines). Examples ofsuch electronic devices are a television set (also referred to as atelevision or a television receiver), a monitor of a computer or thelike, a camera such as a digital camera or a digital video camera, adigital photo frame, a mobile phone handset (also referred to as amobile phone or a mobile phone device), a portable game machine, aportable information terminal, an audio reproducing device, alarge-sized game machine such as a pinball machine, and the like.

FIG. 23A illustrates an example of a television set 9600. In thetelevision set 9600, a display portion 9603 is incorporated in a housing9601. The display portion 9603 can display images. Here, the housing9601 is supported by a stand 9605.

The television set 9600 can be operated with an operation switch of thehousing 9601 or a separate remote controller 9610. Channels can beswitched and volume can be controlled with operation keys 9609 of theremote controller 9610, whereby an image displayed on the displayportion 9603 can be controlled. Moreover, the remote controller 9610 maybe provided with a display portion 9607 for displaying data outputtedfrom the remote controller 9610.

Note that the television set 9600 is provided with a receiver, a modem,and the like. With the use of the receiver, general TV broadcasts can bereceived. Moreover, when the display device is connected to acommunication network with or without wires via the modem, one-way (froma sender to a receiver) or two-way (between a sender and a receiver orbetween receivers) information communication can be performed.

FIG. 23B illustrates an example of a digital photo frame 9700. Forexample, in the digital photo frame 9700, a display portion 9703 isincorporated in a housing 9701. The display portion 9703 can display avariety of images. For example, the display portion 9703 can displaydata of an image taken with a digital camera or the like and function asa normal photo frame.

Note that the digital photo frame 9700 is provided with an operationportion, an external connection portion (a USB terminal, a terminalconnectable to a variety of cables such as a USB cable, or the like), arecording medium insertion portion, and the like. Although thesecomponents may be provided on the same surface as the display portion,it is preferable to provide them on the side surface or the back surfacefor design aesthetics. For example, a memory storing data of an imagetaken with a digital camera is inserted in the recording mediuminsertion portion of the digital photo frame 9700 and the data isloaded, whereby the image can be displayed on the display portion 9703.

The digital photo frame 9700 may be configured to transmit and receivedata wirelessly. Through wireless communication, desired image data canbe loaded to be displayed.

FIG. 24A is a portable game machine and is constituted by two housingsof a housing 9881 and a housing 9891 which are connected with a jointportion 9893 so that the portable game machine can be opened and folded.A display portion 9882 and a display portion 9883 are incorporated inthe housing 9881 and the housing 9891, respectively. In addition, theportable game machine illustrated in FIG. 24A is provided with a speakerportion 9884, a recording medium insertion portion 9886, an LED lamp9890, input means (operation keys 9885, a connection terminal 9887, asensor 9888 (having a function of measuring force, displacement,position, speed, acceleration, angular velocity, rotation number,distance, light, liquid, magnetism, temperature, chemical substance,sound, time, hardness, electric field, current, voltage, electric power,radial ray, flow rate, humidity, gradient, vibration, smell, or infraredray), and a microphone 9889), and the like. Needless to say, thestructure of the portable game machine is not limited to the abovestructure and other structures provided with at least a semiconductordevice disclosed in this specification can be employed. The portablegame machine may include other accessory as appropriate. The portablegame machine illustrated in FIG. 24A has a function of reading a programor data stored in the recording medium to display it on the displayportion, and a function of sharing information with another portablegame machine by wireless communication. Note that a function of theportable game machine illustrated in FIG. 24A is not limited to thosedescribed above, and the portable game machine can have a variety offunctions.

FIG. 24B illustrates an example of a slot machine 9900 which is alarge-sized game machine. In the slot machine 9900, a display portion9903 is incorporated in a housing 9901. In addition, the slot machine9900 includes an operation means such as a start lever or a stop switch,a coin slot, a speaker, and the like. Needless to say, the structure ofthe slot machine 9900 is not limited to the above and other structuresprovided with at least a semiconductor device disclosed in thisspecification may be employed. The slot machine 9900 may include otheraccessory as appropriate.

FIG. 25A is a perspective view illustrating an example of a portablecomputer.

In the portable computer illustrated in FIG. 25A, a top housing 9301having a display portion 9303 and a bottom housing 9302 having akeyboard 9304 can overlap with each other by closing a hinge unit whichconnects the top housing 9301 and the bottom housing 9302. The portablecomputer illustrated in FIG. 25A is conveniently carried. Moreover, inthe case of using the keyboard for input of data, the hinge unit isopened so that a user can input data looking at the display portion9303.

The bottom housing 9302 includes a pointing device 9306 with which inputcan be performed, in addition to the keyboard 9304. When the displayportion 9303 is a touch panel, a user can input data by touching a partof the display portion. The bottom housing 9302 includes an arithmeticfunction portion such as a CPU or hard disk. In addition, the bottomhousing 9302 includes an external connection port 9305 into whichanother device, for example, a communication cable conformable tocommunication standards of a USB is inserted.

The top housing 9301, which includes a display portion 9307 and can keepthe display portion 9307 therein by sliding it toward the inside of thetop housing 9301, can have a large display screen. In addition, a usercan adjust the angle of a screen of the display portion 9307 which canbe kept in the top housing 9301. When the display portion 9307 which canbe kept in the top housing 9301 is a touch panel, a user can input databy touching a part of the display portion 9307.

The display portion 9303 or the stowable display portion 9307 is areformed using an image display device such as a liquid crystal displaypanel or a light-emitting display panel using an organic light-emittingelement, an inorganic light-emitting element, or the like.

In addition, the portable computer illustrated in FIG. 25A can beprovided with a receiver and the like and can receive a TV broadcast todisplay an image on the display portion. A user can watch a TV broadcastwhen the whole screen of the display portion 9307 is exposed by beingslid while the hinge unit which connects the top housing 9301 and thebottom housing 9302 is kept closed. In this case, the hinge unit is notopened and display is not performed on the display portion 9303. Inaddition, start up of only a circuit for displaying a TV broadcast isperformed. Thus, power consumption can be minimized, which is useful forthe portable computer whose battery capacity is limited.

FIG. 25B is a perspective view of an example of a mobile phone that theuser can wear on the wrist like a wristwatch.

This mobile phone is formed with a main body which includes acommunication device including at least a telephone function, and abattery; a band portion 9204 which enables the main body to be worn onthe wrist; an adjusting portion 9205 for adjusting the band portion 9204to fit the wrist; a display portion 9201; a speaker 9207; and amicrophone 9208.

In addition, the main body includes operation switches 9203. Theoperation switches 9203 can serve, for example, as a switch for startinga program for the Internet when pushed, in addition to serving as apower switch, a switch for switching displays, a switch for instructionto start taking images, or the like, and can be configured to haverespective functions.

A user can input data into this mobile phone by touching the displayportion 9201 with a finger or an input pen, operating the operationswitches 9203, or inputting voice into the microphone 9208. In FIG. 25B,display buttons 9202 are displayed on the display portion 9201. A usercan input data by touching the display buttons 9202 with a finger or thelike.

Further, the main body includes a camera portion 9206 including an imagepick-up means having a function of converting an image of an object,which is formed through a camera lens, to an electronic image signal.Note that the camera portion is not necessarily provided.

The mobile phone illustrated in FIG. 25B is provided with a receiver ofa TV broadcast and the like, and can display an image on the displayportion 9201 by receiving the TV broadcast. In addition, the mobilephone is provided with a memory device such as a memory, and the like,and can record the TV broadcast in the memory. The mobile phoneillustrated in FIG. 25B may have a function of collecting locationinformation such as GPS.

An image display device such as a liquid crystal display panel or alight-emitting display panel using an organic light-emitting element, aninorganic light-emitting element, or the like is used as the displayportion 9201. The mobile phone illustrated in FIG. 25B is compact andlightweight and the battery capacity is limited. For the above reason, apanel which can be driven with low power consumption is preferably usedas a display device for the display portion 9201.

Note that although FIG. 25B illustrates the electronic device which isworn on the wrist, this embodiment is not limited thereto as long as anelectronic device is portable.

Embodiment 12

In this embodiment, as one mode of a semiconductor device, examples ofdisplay devices each including the thin film transistor described in anyof Embodiments 1 to 5 will be described with reference to FIGS. 26 to39. In this embodiment, examples of liquid crystal display devices ineach of which a liquid crystal element is used as a display element willbe described with reference to FIGS. 26 to 39. The thin film transistordescribed in any of Embodiments 1 to 5 can be used as TFTs 628 and 629.The TFTs 628 and 629 can be manufactured through a process similar tothat described in any of Embodiments 1 to 5 and have excellentelectrical characteristics and high reliability. The TFT 628 and the TFT629 include a channel protective layer 608 and a channel protectivelayer 611, respectively, and are inverted staggered thin filmtransistors in each of which a channel formation region is formed in anoxide semiconductor layer.

First, a vertical alignment (VA) liquid crystal display device isdescribed. The VA liquid crystal display device has a kind of form inwhich alignment of liquid crystal molecules of a liquid crystal displaypanel is controlled. In the VA liquid crystal display device, liquidcrystal molecules are aligned in a vertical direction with respect to apanel surface when no voltage is applied. In this embodiment, inparticular, a pixel is divided into some regions (subpixels), andmolecules are aligned in different directions in their respectiveregions. This is referred to as multi-domain or multi-domain design.Liquid crystal display devices of the multi-domain design are describedbelow.

FIG. 27 and FIG. 28 illustrate a pixel electrode and a counterelectrode, respectively. FIG. 27 is a plan view showing the substrateside where the pixel electrode is formed. FIG. 26 illustrates across-sectional structure taken along section line E-F in FIG. 27. FIG.28 is a plan view showing the substrate side where the counter electrodeis formed. Description below is given with reference to those drawings.

In FIG. 26, a substrate 600 over which a TFT 628, a pixel electrodelayer 624 connected to the TFT 628, and a storage capacitor portion 630are formed and a counter substrate 601 for which a counter electrodelayer 640 and the like are provided overlap with each other, and liquidcrystals are injected between the substrate 600 and the countersubstrate 601.

A coloring film 636 and the counter electrode layer 640 are provided forthe counter substrate 601, and protrusions 644 are formed on the counterelectrode layer 640. An alignment film 648 is formed over the pixelelectrode layer 624, and an alignment film 646 is similarly formed onthe counter electrode layer 640 and the protrusions 644. A liquidcrystal layer 650 is formed between the substrate 600 and the countersubstrate 601.

The TFT 628, the pixel electrode layer 624 connected to the TFT 628, andthe storage capacitor portion 630 are formed over the substrate 600. Thepixel electrode layer 624 is connected to a wiring 618 through a contacthole 623 which penetrates an insulating film 620 for covering the TFT628, a wiring 616, and the storage capacitor portion 630 and alsopenetrates an insulating film 622 for covering the insulating film 620.The thin film transistor described in any of Embodiments 1 to 5 can beused as the TFT 628 as appropriate. Further, the storage capacitorportion 630 includes a first capacitor wiring 604 which is formed at thesame time as a gate wiring 602 of the TFT 628; a gate insulating film606; and a second capacitor wiring 617 which is formed at the same timeas the wirings 616 and 618.

The pixel electrode layer 624, the liquid crystal layer 650, and thecounter electrode layer 640 overlap with each other, whereby a liquidcrystal element is formed.

FIG. 27 illustrates a structure on the substrate 600. The pixelelectrode layer 624 is formed using the material described inEmbodiment 1. The pixel electrode layer 624 is provided with slits 625.The slits 625 are provided for controlling the alignment of the liquidcrystals.

A TFT 629, a pixel electrode layer 626 connected to the TFT 629, and astorage capacitor portion 631 which are illustrated in FIG. 27 can beformed in a manner similar to that of the TFT 628, the pixel electrodelayer 624, and the storage capacitor portion 630, respectively. Both theTFTs 628 and 629 are connected to the wiring 616. One pixel of thisliquid crystal display panel includes the pixel electrode layers 624 and626. The pixel electrode layers 624 and 626 constitute subpixels.

FIG. 28 illustrates a planar structure of the counter substrate side.The counter electrode layer 640 is formed over a light-blocking film632. The counter electrode layer 640 is preferably formed using amaterial similar to that of the pixel electrode layer 624. Theprotrusions 644 which control the alignment of the liquid crystals areformed on the counter electrode layer 640. Note that in FIG. 28, thepixel electrode layers 624 and 626 formed over the substrate 600 arerepresented by dashed lines, and the counter electrode layer 640 and thepixel electrode layers 624 and 626 overlap with each other.

FIG. 29 illustrates an equivalent circuit of this pixel structure. Boththe TFTs 628 and 629 are connected to the gate wiring 602 and the wiring616. In that case, when potentials of the capacitor wiring 604 and acapacitor wiring 605 are different from each other, operations of liquidcrystal elements 651 and 652 can vary. In other words, the alignment ofthe liquid crystals is precisely controlled and a viewing angle isincreased by separate control of potentials of the capacitor wirings 604and 605.

When a voltage is applied to the pixel electrode layer 624 provided withthe slits 625, a distorted electric field (an oblique electric field) isgenerated in the vicinity of the slits 625. The protrusions 644 on thecounter substrate 601 side and the slits 625 are alternately arranged sothat the oblique electric field is effectively generated to control thealignment of the liquid crystals, whereby the direction of the alignmentof the liquid crystals varies depending on the location. In other words,a viewing angle of the liquid crystal display panel is increased bymulti-domain.

Next, a VA liquid crystal display device, which is different from theabove-described device, will be described with reference to FIG. 30 toFIG. 33.

FIG. 30 and FIG. 31 illustrate a pixel structure of a VA liquid crystaldisplay panel. FIG. 31 is a plan view of the substrate 600. FIG. 30illustrates a cross-sectional structure taken along section line Y-Z inFIG. 31.

In this pixel structure, a plurality of pixel electrodes are provided inone pixel, and a TFT is connected to each of the pixel electrodes. Theplurality of TFTs are driven by different gate signals. That is, signalsapplied to individual pixel electrodes in a multi-domain pixel arecontrolled independently of each other.

A pixel electrode layer 624 is connected to a TFT 628 through a wiring618 in a contact hole 623 penetrating the insulating film 622. The pixelelectrode layer 626 is connected to a TFT 629 through a wiring 619 in acontact hole 627 penetrating the insulating film 622. A gate wiring 602of the TFT 628 is separated from a gate wiring 603 of the TFT 629 sothat different gate signals can be supplied. On the other hand, a wiring616 serving as a data line is shared by the TFTs 628 and 629. The thinfilm transistor described in any of Embodiments 1 to 5 can be used asthe TFTs 628 and 629 as appropriate. Note that a gate insulating film606 is formed over the gate wiring 602, the gate wiring 603, and acapacitor wiring 690.

The shape of the pixel electrode layer 624 is different from that of thepixel electrode layer 626. The pixel electrode layer 626 is formed so asto surround the external side of the pixel electrode layer 624 whichspreads into a V shape. Voltages applied to the pixel electrode layers624 and 626 are made to be different in TFTs 628 and 629, wherebyalignment of liquid crystals is controlled. FIG. 33 illustrates anequivalent circuit of this pixel structure. The TFT 628 is connected tothe gate wiring 602, and the TFT 629 is connected to the gate wiring603. Both the TFTs 628 and 629 are connected to the wiring 616. Whendifferent gate signals are supplied to the gate wirings 602 and 603,operations of liquid crystal elements 651 and 652 can vary. That is, theoperations of the TFTs 628 and 629 are controlled separately toprecisely control the alignment of the liquid crystals in the liquidcrystal elements 651 and 652, which leads to a wider viewing angle.

A counter substrate 601 is provided with a coloring film 636 and acounter electrode layer 640. A planarization film 637 is formed betweenthe coloring film 636 and the counter electrode layer 640 to preventalignment disorder of the liquid crystals. FIG. 32 illustrates a planarstructure of the counter substrate side. The counter electrode layer 640is an electrode shared by different pixels and slits 641 are formed. Theslits 641 and the slits 625 on the pixel electrode layer 624 and 626sides are alternately arranged so that an oblique electric field iseffectively generated, whereby the alignment of the liquid crystals canbe controlled. Accordingly, the alignment of the liquid crystals canvary in different locations, which leads to a wider viewing angle. Notethat in FIG. 32, the pixel electrode layers 624 and 626 formed over thesubstrate 600 are represented by dashed lines and the counter electrodelayer 640 and the pixel electrode layers 624 and 626 overlap with eachother.

An alignment film 648 is formed over the pixel electrode layer 624 andthe pixel electrode layer 626, and the counter electrode layer 640 issimilarly provided with an alignment film 646. A liquid crystal layer650 is formed between the substrate 600 and a counter substrate 601. Thepixel electrode layer 624, the liquid crystal layer 650, and the counterelectrode layer 640 overlap with each other to form a first liquidcrystal element. The pixel electrode layer 626, the liquid crystal layer650, and the counter electrode layer 640 overlap with each other to forma second liquid crystal element. The pixel structure of the displaypanel illustrated in FIG. 30 to FIG. 33 is a multi-domain structure inwhich the first liquid crystal element and the second liquid crystalelement are provided in one pixel.

Next, a liquid crystal display device in a horizontal electric fieldmode is described. In the horizontal electric field mode, an electricfield is applied in a horizontal direction with respect to liquidcrystal molecules in a cell, whereby liquid crystals are driven toexpress a gray scale. With this method, a viewing angle can be increasedto about 180°. A liquid crystal display device in the horizontalelectric field mode is described below.

In FIG. 34, a substrate 600 over which an electrode layer 607, a TFT628, and a pixel electrode layer 624 connected to the TFT 628 are formedoverlaps with a counter substrate 601, and liquid crystals are injectedbetween the substrate 600 and the counter substrate 601. The countersubstrate 601 is provided with a coloring film 636, a planarization film637, and the like. Note that a counter electrode is not provided on thecounter substrate 601 side. In addition, a liquid crystal layer 650 isformed between the substrate 600 and the counter substrate 601 with thealignment films 646 and 648 therebetween.

The electrode layer 607 and a capacitor wiring 604 connected to theelectrode layer 607, and the TFT 628 are formed over the substrate 600.The capacitor wiring 604 can be formed at the same time as a gate wiring602 of the TFT 628. The thin film transistor described in any ofEmbodiments 1 to 5 can be used as the TFT 628. The electrode layer 607can be formed using a material similar to that of the pixel electrodelayer described in any of Embodiments 1 to 5. The electrode layer 607 isdivided almost in a pixel form. Note that a gate insulating film 606 isformed over the electrode layer 607 and the capacitor wiring 604.

Wirings 616 and 618 of the TFT 628 are formed over the gate insulatingfilm 606. The wiring 616 is a data line through which a video signaltravels, extends in one direction in a liquid crystal display panel, isconnected to a source or drain region of the TFT 628, and functions asone of source and drain electrodes. The wiring 618 functions as theother of the source and drain electrodes and is connected to the pixelelectrode layer 624.

An insulating film 620 is formed over the wirings 616 and 618. Over theinsulating film 620, the pixel electrode layer 624 is formed to beconnected to the wiring 618 through a contact hole formed in theinsulating film 620. The pixel electrode layer 624 is formed using amaterial similar to that of the pixel electrode described in Embodiment1.

In such a manner, the TFT 628 and the pixel electrode layer 624connected to the TFT 628 are formed over the substrate 600. Note that astorage capacitor is formed between the electrode layer 607 and thepixel electrode layer 624.

FIG. 35 is a plan view illustrating a structure of the pixel electrode.FIG. 35 illustrates a cross-sectional structure taken along section lineO-P in FIG. 34. The pixel electrode layer 624 is provided with slits625. The slits 625 are provided for controlling alignment of liquidcrystals. In that case, an electric field is generated between theelectrode layer 607 and the second pixel electrode layer 624. Thethickness of the gate insulating film 606 formed between the electrodelayer 607 and the pixel electrode layer 624 is 50 nm to 200 nm, which ismuch smaller than the thickness of the liquid crystal layer which is 2μm to 10 μm. Thus, an electric field is generated substantially inparallel (in a horizontal direction) to the substrate 600. The alignmentof the liquid crystals is controlled with this electric field. Liquidcrystal molecules are horizontally rotated with the use of the electricfield in the direction substantially parallel to the substrate. In thatcase, the liquid crystal molecules are horizontally aligned in anystate, and thus the contrast or the like is less influenced by theviewing angle, which leads to a wider viewing angle. In addition, sinceboth the electrode layer 607 and the pixel electrode layer 624 arelight-transmitting electrodes, an aperture ratio can be improved.

Next, a different example of the liquid crystal display device in thehorizontal electric field mode is described.

FIG. 36 and FIG. 37 illustrate a pixel structure of a liquid crystaldisplay device in an IPS mode. FIG. 37 is a plan view. FIG. 36illustrates a cross-sectional structure taken along section line V-W inFIG. 37. Description below is given with reference to both the drawings.

In FIG. 36, a substrate 600 over which a TFT 628 and a pixel electrodelayer 624 connected to the TFT 628 are formed overlaps with a countersubstrate 601, and liquid crystals are injected between the substrate600 and the counter substrate 601. The counter substrate 601 is providedwith a coloring film 636, a planarization film 637, and the like. Notethat a counter electrode is not provided on the counter substrate 601side. A liquid crystal layer 650 is formed between the substrate 600 andthe counter substrate 601 with alignment films 646 and 648 therebetween.

A common potential line 609 and the TFT 628 are formed over thesubstrate 600. The common potential line 609 can be formed at the sametime as a gate wiring 602 of the TFT 628. The thin film transistordescribed in any of Embodiments 1 to 5 can be used as the TFT 628.

Wirings 616 and 618 of the TFT 628 are formed over the gate insulatingfilm 606. The wiring 616 is a data line through which a video signaltravels, extends in one direction in a liquid crystal display panel, isconnected to a source or drain region of the TFT 628, and functions asone of source and drain electrodes. The wiring 618 functions as theother of the source and drain electrodes and is connected to the pixelelectrode layer 624.

An insulating film 620 is formed over the wirings 616 and 618. Over theinsulating film 620, the pixel electrode layer 624 is formed to beconnected to the wiring 618 through a contact hole 623 formed in theinsulating film 620. The pixel electrode layer 624 is formed using amaterial similar to that of the pixel electrode described in any ofEmbodiments 1 to 5. Note that, as illustrated in FIG. 37, the pixelelectrode layer 624 is formed such that the pixel electrode layer 624and a comb-like electrode that is formed at the same time as the commonpotential line 609 can generate a horizontal electric field. Further,the pixel electrode layer 624 is formed so that comb-teeth portions ofthe pixel electrode layer 624 and those of the comb-like electrode thatis formed at the same time as the common potential line 609 arealternately arranged.

The alignment of the liquid crystals is controlled by an electric fieldgenerated between a potential applied to the pixel electrode layer 624and a potential of the common potential line 609. Liquid crystalmolecules are horizontally rotated with the use of the electric field inthe direction substantially parallel to the substrate. In that case, theliquid crystal molecules are horizontally aligned in any state, and thusthe contrast or the like is less influenced by the viewing angle, whichleads to a wider viewing angle.

In such a manner, the TFT 628 and the pixel electrode layer 624connected to the TFT 628 are formed over the substrate 600. A storagecapacitor is formed by providing the gate insulating film 606 betweenthe common potential line 609 and a capacitor electrode 615, and formedwith the gate insulating film 606, the common potential line 609, thecapacitor electrode 615. The capacitor electrode 615 and the pixelelectrode layer 624 are connected to each other through a contact hole633.

Next, a mode of a liquid crystal display device in a TN mode isdescribed.

FIG. 38 and FIG. 39 illustrate a pixel structure of a liquid crystaldisplay device in a TN mode. FIG. 39 is a plan view. FIG. 38 illustratesa cross-sectional structure taken along section line K-L in FIG. 39.Description below is given with reference to both the drawings.

A pixel electrode layer 624 is connected to a TFT 628 through a wiring618 and a contact hole 623 formed in an insulating film 620. A wiring616 functioning as a data line is connected to the TFT 628. The TFTdescribed in any of Embodiments 1 to 5 can be used as the TFT 628.

The pixel electrode layer 624 is formed using the pixel electrodedescribed in any of Embodiments 1 to 5. A capacitor wiring 604 can beformed at the same time as a gate wiring 602 of the TFT 628. The gateinsulating film 606 is formed over the gate wiring 602 and the capacitorwiring 604. A storage capacitor is formed with the gate insulating film606, the capacitor wiring 604, and a capacitor electrode 615.

A counter substrate 601 is provided with a coloring film 636 and acounter electrode layer 640. A planarization film 637 is formed betweenthe coloring film 636 and the counter electrode layer 640 to preventalignment disorder of liquid crystals. A liquid crystal layer 650 isformed between the pixel electrode layer 624 and the counter electrodelayer 640 with the alignment films 646 and 648 therebetween.

The pixel electrode layer 624, the liquid crystal layer 650, and thecounter electrode layer 640 overlap with each other, whereby a liquidcrystal element is formed.

The coloring film 636 may be formed on the substrate 600 side. Apolarizing plate is attached to a surface of the substrate 600, which isopposite to the surface provided with the thin film transistor, and apolarizing plate is attached to a surface of the counter substrate 601,which is opposite to the surface provided with the counter electrodelayer 640.

Through the above-described process, liquid crystal display devices canbe manufactured as display devices. The liquid crystal display devicesof this embodiment each have a high aperture ratio.

Embodiment 13

In this embodiment, FIG. 40 illustrates an example in which an oxidesemiconductor layer is surrounded by nitride insulating films when seenin cross section. FIG. 40 is the same as FIG. 1A except the top surfaceshape and the positions of end portions of an oxide insulating layer416, and the structure of the gate insulating layer. Thus, specificdescription of the same portions is omitted.

A thin film transistor 410 provided in a driver circuit is achannel-stop-type thin film transistor and includes, over a substrate400 having an insulating surface, a gate electrode layer 411, a gateinsulating layer 402 formed using a nitride insulating film, an oxidesemiconductor layer including at least an oxide semiconductor layer 413,a first low-resistant n-type region 414 a, and a second low-resistantn-type region 414 b, a source electrode layer 415 a, and a drainelectrode layer 415 b. In addition, the oxide insulating layer 416 whichfunctions as a channel protective layer is provided so as to be incontact with the oxide semiconductor layer 413.

A thin film transistor 420 provided for a pixel is a channel-stop-typethin film transistor like the thin film transistor 410, and includes agate electrode layer 421, a gate insulating layer 402 formed using anitride insulating film, an oxide semiconductor layer 422, a sourceelectrode layer 425 a and a drain electrode layer 425 b. In addition, anoxide insulating layer 426 which functions as a channel protective layeris provided so as to be in contact with a channel formation region ofthe oxide semiconductor layer 422.

The gate insulating layer 402, which is on an outer side than the thinfilm transistor 410 and the thin film transistor 420, is processed so asto be exposed when the oxide insulating layer 416 and the oxideinsulating layer 426 are formed through a photolithography step.

Further, a protective insulating layer 403 formed using a nitrideinsulating film is formed so as to cover a top surface and side surfacesof the thin film transistor 410 and the thin film transistor 420.

The first low-resistant n-type region 414 a is formed in contact with anundersurface of the source electrode layer 415 a in a self-alignedmanner. Further, the second low-resistant n-type region 414 b is formedin contact with an undersurface of the drain electrode layer 405 b in aself-aligned manner. The channel formation region of the oxidesemiconductor layer 413 is in contact with the oxide insulating layer416, has a small thickness, and is a region (i-type region) havinghigher resistance than the first low-resistant n-type region 414 a andthe second low-resistant n-type region 414 b.

The gate insulating layer 402 is formed, using a nitride insulatingfilm, in contact with undersurfaces of the channel formation region ofthe oxide semiconductor layer 413, the first low-resistant n-type region414 a, and the second low-resistant n-type region 414 b.

For the protective insulating layer 403 formed using a nitrideinsulating film, an inorganic insulating film which does not containimpurities such as moisture, a hydrogen ion, and OH⁻ and blocks entry ofthem from the outside is used: for example, a silicon nitride film, asilicon oxynitride film, an aluminum nitride film, or an aluminumoxynitride film obtained with a sputtering method is used.

In this embodiment, as the protective insulating layer 403 formed usinga nitride insulating film, a silicon nitride film is formed to athickness of 100 nm with an RF sputtering method so as to cover a topsurface and side surfaces of the thin film transistor 410 and the thinfilm transistor 420. In addition, the protective insulating layer 403 isin contact with the gate insulating layer 402 formed using a nitrideinsulating film outside the thin film transistor 410 and the thin filmtransistor 420.

With the structure illustrated in FIG. 40, entry of moisture from theoutside can be prevented in a manufacturing process after formation ofthe protective insulating layer 403 formed using a nitride insulatingfilm. Further, even after a device is completed as a semiconductordevice such as a liquid crystal display device, entry of moisture fromthe outside can be prevented in the long term; therefore, long-termreliability of the device can be improved.

In this embodiment, the structure in which one thin film transistor iscovered with a nitride insulating film; however, one embodiment of thepresent invention is not limited thereto. Alternatively, a plurality ofthin film transistors may be covered with a nitride insulating film or aplurality of thin film transistors in a pixel portion may becollectively covered with a nitride insulating film. A region where theprotective insulating layer 403 and the gate insulating layer 402 are incontact with each other may be formed so that at least the pixel portionof the active matrix substrate is surrounded.

This embodiment can be freely combined with any of the otherembodiments.

This application is based on Japanese Patent Application serial no.2009-169601 filed with Japan Patent Office on Jul. 18, 2009, the entirecontents of which are hereby incorporated by reference.

EXPLANATION OF REFERENCE

10: first pulse output circuit, 11: wiring, 12: wiring, 13: wiring, 14:wiring, 15: wiring, 21: input terminal, 22: input terminal, 23: inputterminal, 24: input terminal, 25: input terminal, 26: output terminal,27: output terminal, 31: transistor, 32: transistor, 33: transistor, 34:transistor: 35: transistor, 36: transistor, 37: transistor, 38:transistor, 39: transistor, 40: transistor, 41: transistor, 42:transistor, 43: transistor, 51: power supply line, 52: power supplyline, 53: power supply line, 61: period, 62: period, 100: substrate,102: gate insulating film, 102 b: gate insulating film, 107: protectiveinsulating film, 107 a: protective insulating film, 108: protectiveinsulating film, 111: bottom-gate electrode, 113: oxide semiconductorlayer, 113 a: oxide semiconductor layer, 113 b: oxide semiconductorlayer, 113 c: oxide semiconductor layer, 113 d: oxide semiconductorregion, 114 a: conductive layer, 114 b: conductive layer, 115 a:conductive layer, 115 b: conductive layer, 116: channel protectivelayer, 125: contact hole, 128: pixel electrode, 129: back-gateelectrode, 134: resist mask, 135: resist mask, 141: thin filmtransistor, 142: thin film transistor, 143: thin film transistor, 144:thin film transistor, 145: thin film transistor, 146: thin filmtransistor, 200: substrate, 202 a: gate insulating layer, 202 b: gateinsulating layer, 203: protective insulating layer, 204: protectiveinsulating layer, 210: thin film transistor, 211: bottom-gate electrode,213: oxide semiconductor layer, 213 a: oxide semiconductor layer, 213 b:oxide semiconductor layer, 213 c: oxide semiconductor layer, 213 d:oxide semiconductor region, 214 a: source electrode or drain electrode,214 b: source electrode or drain electrode, 215 a: conductive layer, 215b: conductive layer, 216: channel protective layer, 217: conductivelayer, 220: thin film transistor, 224: contact hole, 227: pixelelectrode layer, 230: capacitor wiring layer, 231: capacitor electrode,232: gate wiring layer, 234: source wiring, 235: terminal electrode,236: metal wiring layer, 237: metal wiring layer, 238: gate wiringlayer, 240: thin film transistor, 241: metal wiring layer, 242: metalwiring layer, 250: capacitor wiring layer, 251: oxide semiconductorlayer, 400: substrate, 402: gate insulating layer, 403: protectiveinsulating layer, 405 b: drain electrode layer, 410: thin filmtransistor, 411: gate electrode layer, 413: oxide semiconductor layer,414 a: low-resistant n-type region, 414 b: low-resistant n-type region,415 a: source electrode layer, 415 b: drain electrode layer, 416: oxideinsulating layer, 420: thin film transistor, 421: gate electrode layer,422: oxide semiconductor layer, 425 a: source electrode layer, 425 b:drain electrode layer, 426: oxide insulating layer, 580: substrate, 581:thin film transistor, 583: insulating film, 585: insulating layer, 587:electrode layer, 588: electrode layer, 589: spherical particle, 590 a:black region, 590 b: white region, 594: cavity, 595: filler, 596:substrate, 600: substrate, 601: counter substrate, 602: gate wiring,603: gate wiring, 604: capacitor wiring, 605: capacitor wiring, 606:gate insulating film, 607: electrode layer, 608: channel protectivelayer, 609: common potential line, 611: channel protective layer, 615:capacitor electrode, 616: wiring, 617: capacitor wiring, 618: wiring,619: wiring, 620: insulating film, 622: insulating film, 623: contacthole, 624: pixel electrode layer, 625: slit, 626: pixel electrode layer,627: contact hole, 628: TFT, 629: TFT, 630: storage capacitor portion,631: storage capacitor portion, 632: light-blocking film, 633: contacthole, 636: coloring film, 637: planarization film, 640: counterelectrode layer, 641: slit, 644: protrusion, 646: alignment film, 648:alignment film, 650: liquid crystal layer, 651: liquid crystal element,652: liquid crystal element, 690: capacitor wiring, 2600: TFT substrate,2601: counter substrate, 2602: sealant, 2603: pixel portion, 2604:display element, 2605: coloring layer, 2606: polarizing plate, 2607:polarizing plate, 2608: wiring circuit portion, 2609: flexible wiringboard, 2610: cold cathode tube, 2611: reflective plate, 2612: circuitboard, 2613: diffusion plate, 2700: e-book reader, 2701: housing, 2703:housing, 2705: display portion, 2707: display portion, 2711: hinge,2721: power switch, 2723: operation key, 2725: speaker, 4001: substrate,4002: pixel portion, 4003: signal line driver circuit, 4004: scan linedriver circuit, 4005: sealant, 4006: substrate, 4008: liquid crystallayer, 4010: thin film transistor, 4011: thin film transistor, 4013:liquid crystal element, 4015: connection terminal electrode, 4016:terminal electrode, 4018: FPC, 4019: anisotropic conductive film, 4020:insulating layer, 4021: insulating layer, 4030: pixel electrode layer,4031: counter electrode layer, 4032: insulating layer, 4035: spacer,4040: back-gate electrode, 4041: insulating layer, 4042: insulatinglayer, 4501: substrate, 4502: pixel portion, 4503 a: signal line drivercircuit, 4504 a: scan line driver circuit, 4505: sealant, 4506:substrate, 4507: filler, 4509: thin film transistor, 4510: thin filmtransistor, 4511: light-emitting element, 4512: electroluminescentlayer, 4513: electrode layer, 4515: connection terminal electrode, 4516:terminal electrode, 4517: electrode layer, 4518 a: FPC, 4518 b: FPC,4519: anisotropic conductive film, 4520: bank, 4540: back-gateelectrode, 4541: insulating layer, 4542: insulating layer, 4543:insulating layer, 4544: insulating layer, 5300: substrate, 5301: pixelportion, 5302: scan line driver circuit, 5303: scan line driver circuit,5304: signal line driver circuit, 5305: timing control circuit, 5601:shift register, 5602: switching circuit, 5603: thin film transistor,5604: wiring, 5605: wiring, 6400: pixel, 6401: switching transistor,6402: driver transistor, 6403: capacitor, 6404: light-emitting element,6405: signal line, 6406: scan line, 6407: power supply line, 6408:common electrode, 7001: TFT, 7002: light-emitting element, 7003:cathode, 7004: light-emitting layer, 7005: anode, 7008: cathode, 7009:bank, 7011: driver TFT, 7012: light-emitting element, 7013: cathode,7014: light-emitting layer, 7015: anode, 7016: light-blocking film,7017: conductive film, 7018: conductive film, 7019: bank, 7021: driverTFT, 7022: light-emitting element, 7023: cathode, 7024: light-emittinglayer, 7025: anode, 7027: conductive film, 7028: conductive film, 7029:bank, 9201: display portion, 9202: display button, 9203: operationswitch, 9204: band portion, 9205: adjusting portion, 9206: cameraportion, 9207: speaker, 9208: microphone, 9301: top housing, 9302:bottom housing, 9303: display portion, 9304: keyboard, 9305: externalconnection port, 9306: pointing device, 9307: display portion, 9600:television set, 9601: housing, 9603: display portion, 9605: stand, 9607:display portion, 9609: operation key, 9610: remote controller, 9700:digital photo flame, 9701: housing, 9703: display portion, 9881:housing, 9882: display portion, 9883: display portion, 9884: speakerportion, 9885: input means (operation key), 9886: recording mediuminsertion portion, 9887: connection terminal, 9888: sensor, 9889:microphone, 9890: LED lamp, 9891: housing, 9893: joint portion, 9900:slot machine, 9901: housing, 9903: display portion.

The invention claimed is:
 1. A method for manufacturing a semiconductordevice comprising a pixel portion and a driver circuit portion,comprising: forming a first conductive layer in the pixel portion andthe driver portion; forming a first insulating layer over the firstconductive layer in the pixel portion and the driver portion; forming anoxide semiconductor layer over the first insulating layer in the pixelportion and the driver portion; forming a second insulating layer overand in contact with a part of the oxide semiconductor layer in the pixelportion and the driver portion; forming a second conductive layer and athird conductive layer over the second insulating layer and the oxidesemiconductor layer in the pixel portion and the driver portion; forminga fourth conductive layer electrically connected to one of the secondconductive layer and the third conductive layer in the pixel portion;and forming a fifth conductive layer overlapping the first conductivelayer in the driver circuit portion, wherein the fourth conductive layerand the fifth conductive layer are formed on a same surface.
 2. Themethod for manufacturing a semiconductor device according to claim 1,wherein the first conductive layer comprises copper.
 3. The method formanufacturing a semiconductor device according to claim 1, wherein theoxide semiconductor layer comprises indium, gallium, and zinc.
 4. Themethod for manufacturing a semiconductor device according to claim 1,wherein each of the fourth conductive layer and the fifth conductivelayer comprises zinc.
 5. The method for manufacturing a semiconductordevice according to claim 1, wherein each of the fourth conductive layerand the fifth conductive layer has a light-transmitting property.
 6. Themethod for manufacturing a semiconductor device according to claim 1,wherein the fourth conductive layer is formed over the second insulatinglayer in the pixel portion, and wherein the fifth conductive layer isformed over the second insulating layer in the driver circuit portion.7. The method for manufacturing a semiconductor device according toclaim 1, wherein the second insulating layer comprises siliconoxynitride.
 8. The method for manufacturing a semiconductor deviceaccording to claim 1, wherein the first conductive layer of the drivercircuit portion and the fifth conductive layer are supplied with a samepotential.
 9. The method for manufacturing a semiconductor deviceaccording to claim 1, wherein the pixel portion further comprises acapacitor having a light-transmitting property.
 10. The method formanufacturing a semiconductor device according to claim 1, wherein theoxide semiconductor layer comprises a region in contact with the secondinsulating layer, and wherein a carrier concentration of the region isless than 1×10¹⁷/cm³.
 11. A method for manufacturing a semiconductordevice comprising a pixel portion and a driver circuit portion,comprising: forming a first conductive layer in the pixel portion andthe driver circuit portion; forming a first insulating layer over thefirst conductive layer in the pixel portion and the driver circuitportion; forming an oxide semiconductor layer over the first insulatinglayer in the pixel portion and the driver circuit portion; forming asecond insulating layer over and in contact with a part of the oxidesemiconductor layer in the pixel portion and the driver circuit portion;forming a second conductive layer and a third conductive layer over thesecond insulating layer and the oxide semiconductor layer in the pixelportion and the driver circuit portion; forming a third insulating layerover the second conductive layer and the third conductive layer in thepixel portion and the driver circuit portion; forming a fourthconductive layer electrically connected to one of the second conductivelayer and the third conductive layer in the pixel portion; and forming afifth conductive layer overlapping the first conductive layer in thedriver circuit portion, wherein the fourth conductive layer and thefifth conductive layer are formed on a same surface.
 12. Thesemiconductor device according to claim 11, wherein the first conductivelayer comprises copper.
 13. The semiconductor device according to claim11, wherein the oxide semiconductor layer comprises indium, gallium, andzinc.
 14. The semiconductor device according to claim 11, wherein eachof the fourth conductive layer and the fifth conductive layer compriseszinc.
 15. The method for manufacturing a semiconductor device accordingto claim 11, wherein each of the fourth conductive layer and the fifthconductive layer has a light-transmitting property.
 16. The method formanufacturing a semiconductor device according to claim 11, wherein thefourth conductive layer is formed over the second insulating layer inthe pixel portion, and wherein the fifth conductive layer is formed overthe second insulating layer in the driver circuit portion.
 17. Thesemiconductor device according to claim 11, wherein the secondinsulating layer comprises silicon oxynitride.
 18. The semiconductordevice according to claim 11, wherein the third insulating layercomprises silicon nitride.
 19. The semiconductor device according toclaim 11, wherein the first conductive layer of the driver circuitportion and the fifth conductive layer are supplied with a samepotential.
 20. The semiconductor device according to claim 11, whereinthe pixel portion further comprises a capacitor having alight-transmitting property.
 21. The semiconductor device according toclaim 11, wherein the oxide semiconductor layer comprises a region incontact with the second insulating layer, and wherein a carrierconcentration of the region is less than 1×10¹⁷/cm³.